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Gases

 
. SEMI C3-0413 Specifications for Gases
. SEMI C3.2-0611 Specification for Arsine (AsH3) in Cylinders, 99.94% Quality
. SEMI C3.6-0710 Specification for Phosphine (PH3) in Cylinders, 99.98% Quality
. SEMI C3.12-1109 Specification for Ammonia (NH3) in Cylinders, 99.998% Quality
. SEMI C3.20-0414 Specification for Helium (He), in Cylinders, 99.9995%
. SEMI C3.24-0414 Specification for Sulfur Hexafluoride (SF6) in Cylinders, 99.97% Quality
. SEMI C3.27-1102 (Reapproved 1011) Specification for Boron Trifluoride (BF3) in Cylinders, 99.0% Quality
. SEMI C3.32-0614 Specification for Chlorine (Cl2), 99.996% Quality
. SEMI C3.34-1109 Specification for Disilane (Si2H6) in Cylinders, 97% Quality
. SEMI C3.35-1109E Specification for Hydrogen Chloride (HCI), 99.997% Quality
. SEMI C3.37-0614 Specification for Hexafluoroethane (C2F6), 99.97% Quality
. SEMI C3.39-1011 Specification for Nitrogen Trifluoride (NF3), 99.98%
. SEMI C3.40-1011 Specification for Carbon Tetrafluoride (CF4), 99.997% Quality
. SEMI C3.47-1011 Specification for Hydrogen Bromide (HBr), 99.98% Quality
. SEMI C3.55-1011 Specification for Silane (SiH4), Bulk, 99.994% Quality
. SEMI C3.56-0312 Specification for Diborane Mixtures
. SEMI C3.57-0312 Specification for Carbon Dioxide, CO2, Electronic Grade in Cylinders
. SEMI C3.58-1011 Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% Quality
. SEMI C6.2-93 (Reapproved 1111) Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas
. SEMI C6.3-89 (Reapproved 1111) Particle Specification for Grade 20/0.2 Hydrogen (H2) Delivered as Pipeline Gas
. SEMI C6.4-90 (Reapproved 1111) Particle Specification for Grade 20/0.02 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas
. SEMI C6.5-90 (Reapproved 1111) Particle Specification for Grade 10/0.2 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas
. SEMI C6.6-90 (Reapproved 1111) Particle Specification for Grade 10/0.1 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas
. SEMI C6.7-93 (Reapproved 1111) Particle Specification for Grade 10/0.2 Nitrogen in High Pressure Gas Cylinders
. SEMI C9.1-0212 Guide for Analysis of Uncertainties in Gravimetrically Prepared Gas Mixtures
. SEMI C14-95 (Reapproved 0913) Test Method for Particle Shedding Performance of 25 cm Gas Filter Cartridges
. SEMI C15-0212 Test Method for ppm and ppb Humidity Standards
. SEMI C52-0301 (Reapproved 0312) Specification for the Shelf Life of a Specialty Gas
. SEMI C54-1103 (Reapproved 0211) Specifications and Guidelines for Oxygen
. SEMI C55-1104 (Reapproved 0211) Specification for Liquid Carbon Dioxide (CO2) Used in Near Critical, Critical and Supercritical Applications, >/ 99.99% Quality
. SEMI C56-0305 (Reapproved 0211) Specifications and Guidelines for Dichlorosilane (SiH2Cl2)
. SEMI C57-0305 (Reapproved 0211) Specifications and Guidelines for Argon
. SEMI C58-1213 Specifications for Hydrogen
. SEMI C59-1104 (Reapproved 0211) Specifications and Guidelines for Nitrogen
. SEMI C60-0305 (Reapproved 0211) Specifications and Guidelines for Nitrous Oxide (N2O)
. SEMI C70-0611 Specifications for Tungsten Hexafluoride (WF6)
. SEMI C71-0611 Specification and Guide for Boron Trichloride (BCI3)