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. SEMI C78-0113 Test Method for Determining Roughness of Polymer Surfaces Used in Ultrapure Water and Liquid Chemical Distribution Systems by Atomic Force Microscopy
. SEMI E16-0611 Guideline for Determining and Describing Mass Flow Controller Leak Rates
. SEMI E17-1011 Guide for Mass Flow Controller Transient Characteristics Tests
. SEMI E51-0200 Guide for Typical Facilities Services and Termination Matrix
. SEMI E76-0299 (Reapproved 0913) Guide for 300 mm Process Equipment Points of Connection to Facility Services
. SEMI E80-0299 (Reapproved 0710) Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position)
. SEMI E129-0912 Guide to Assess and Control Electrostatic Charge in a Semiconductor Manufacturing Facility
. SEMI F1-0812 Specification for Leak Integrity of High-Purity Gas Piping Systems and Components
. SEMI F4-0211 Specification for Pneumatically Actuated Cylinder Valves
. SEMI F5-1101 Guide for Gaseous Effluent Handling
. SEMI F6-92 Guide for Secondary Containment of Hazardous Gas Piping Systems
. SEMI F7-92 (Reapproved 0299) Test Method to Determine the Tensile Strength of Tube Fitting Connections Made of Fluorocarbon Materials
. SEMI F8-0998 (Reapproved 0613) Test Method for Evaluating the Sealing Capabilities of Tube Fitting Connections Made of Fluorocarbon Materials, When Subjected to Tensile Forces
. SEMI F9-0998 Test Method to Determine the Leakage Characteristics of Tube Fitting Connections Made of Fluorocarbon Materials, When Subjected to a Side Load Condition
. SEMI F10-0698 Test Method to Determine the Internal Pressure Required to Produce a Failure of a Tube Fitting Connection Made of Fluorocarbon Materials
. SEMI F11-0998 Test Method to Obtain an Indication of the Thermal Characteristics of Tube Fitting Connections Made of Fluorocarbon Materials
. SEMI F12-0998 Test Method to Determine the Sealing Capabilities of Fittings, Made of Fluorocarbon Material, after Being Subjected to a Heat Cycle
. SEMI F13-1101 Guide for Gas Source Control Equipment
. SEMI F14-93 (Reapproved 0699) Guide for the Design of Gas Source Equipment Enclosures
. SEMI F18-95 (Reapproved 0413) Guide for Determining the Hydrostatic Strength of, and Design Basis for, Thermoplastic Pipe and Tubing
. SEMI F19-0304 (Reapproved 0310) Specification for the Surface Condition of the Wetted Surfaces of Stainless Steel Components
. SEMI F20-0706E (Reapproved 0611) Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications
. SEMI F21-1102 Classification of Airborne Molecular Contaminant Levels in Clean Environments
. SEMI F22-0812 Guide for Bulk and Specialty Gas Distribution Systems
. SEMI F23-0697 (Reapproved 0712) Particle Specification for Grade 10/0.2 Flammable Specialty Gases
. SEMI F24-0697 (Reapproved 0712) Particle Specification for Grade 10/0.2 Inert Specialty Gases
. SEMI F25-0697 (Reapproved 0712) Particle Specification for Grade 10/0.2 Oxidant Specialty Gases
. SEMI F26-0697 (Reapproved 0712) Particle Specification for Grade 10/0.2 Toxic Specialty Gases
. SEMI F27-0997 (Reapproved 0611) Test Method for Moisture Interaction and Content of Gas Distribution Systems and Components by Atmospheric Pressure Ionization Mass Spectrometry (APIMS)
. SEMI F28-1103 (Reapproved 0710) Test Method for Measuring Particle Generation from Process Panels
. SEMI F29-0997 (Reapproved 0611) Test Method for Purge Efficacy of Gas Source System Panels
. SEMI F30-0710 Start-Up and Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation Site
. SEMI F31-0313 Guide for Bulk Chemical Distribution Systems
. SEMI F32-0211 Test Method for Determining of Flow Coefficient for High Purity Shutoff Valves
. SEMI F33-0708 Test Method for Calibration of Atmospheric Pressure Ionization Mass Spectrometer (APIMS)
. SEMI F34-0998 Guide for Liquid Chemical Pipe Labeling
. SEMI F35-0304 Test Method for Ultra-High Purity Gas Distribution System Integration Verification Using Non-Invasive Oxygen Measurement
. SEMI F36-0299 (Reapproved 0913) Guide for Dimensions and Connections of Gas Distribution Components
. SEMI F37-0299 (Reapproved 0611) Method for Determination of Surface Roughness Parameters for Gas Distribution System Components
. SEMI F38-0699 (Reapproved 0611) Test Method for Efficiency Qualification of Point-of-Use Gas Filters
. SEMI F39-0699 Guideline for Chemical Blending Systems
. SEMI F40-0699E Practice for Preparing Liquid Chemical Distribution Components for Chemical Testing
. SEMI F41-0699 Guide for Qualification of a Bulk Chemical Distribution System Used in Semiconductor Processing
. SEMI F43-0308 (Reapproved 0613) Test Method for Determination of Particle Contribution by Point-of-Use Gas Purifiers and Gas Filters
. SEMI F44-0307 (Reapproved 0812) Specification for Machined Stainless Steel Weld Fittings
. SEMI F45-0307 (Reapproved 0812) Specification for Machined Stainless Steel Reducing Weld Fittings
. SEMI F46-0999 Guide for On-Site Chemical Generation (OSCG) Systems
. SEMI F47-0706 (Reapproved 0812) Specification for Semiconductor Processing Equipment Voltage Sag Immunity
. SEMI F48-0600 (Reapproved 0709) Test Method for Determining Trace Metals in Polymer Materials
. SEMI F49-0200 (Reapproved 1213) Guide for Semiconductor Factory Systems Voltage Sag Immunity
. SEMI F50-0200 (Reapproved 1213) Guide for Electric Utility Voltage Sag Performance for Semiconductor Factories
. SEMI F51-0200 Guide for Elastometric Sealing Technology
. SEMI F52-1101 Dimensional Specification for Metric PFA Tubes for Semiconductor and Flat Panel Display Manufacturing
. SEMI F53-0600 (Reapproved 0412) Test Method for Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow Controllers
. SEMI F54-1000 (Reapproved 1110) Test Method for Measuring the Counting Efficiency of Condensation Nucleus Counters
. SEMI F55-0600 (Reapproved 0412) Test Method for Determining the Corrosion Resistance of Mass Flow Controllers
. SEMI F56-0600 (Reapproved 0412) Test Method for Determining Steady-State Supply Voltage Effects for Mass Flow Controllers
. SEMI F57-0314 Specification for Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
. SEMI F58-0708 Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Atmospheric Pressure Ionization Mass Spectrometry (APIMS)
. SEMI F59-0302 (Reapproved 0613) Test Method for Determination of Filter or Gas System Flow Pressure Drop Curves
. SEMI F60-0306 (Reapproved 0611) Test Method for ESCA Evaluation of Surface Composition of Wetted Surfaces of Passivated 316L Stainless Steel Components
. SEMI F61-0301 (Reapproved 0309) Guide for Ultrapure Water System Used in Semiconductor Processing
. SEMI F62-0701 (Reapproved 1111) Test Method for Determining Mass Flow Controller Performance Characteristics for Ambient and Gas Temperature Effects
. SEMI F63-0213 Guide for Ultrapure Water Used in Semiconductor Processing
. SEMI F64-0701 (Reapproved 1111) Test Method for Determining Pressure Effects on Indicated and Actual Flow for Mass Flow Controllers
. SEMI F65-1101 Dimensional Specification for Mounting Bases of Diaphragm Valves Used with Metric PFA Tubes
. SEMI F66-1101 Specification for Port Marking and Symbol of Stainless Steel Vessels for Liquid Chemicals
. SEMI F67-1101 (Reapproved 0713) Test Method for Determining Inert Gas Purifier Capacity
. SEMI F68-1101 (Reapproved 0713) Test Method for Determining Purifier Efficiency
. SEMI F69-1213 Test Methods for Transport and Shock Testing of Gas Delivery Systems
. SEMI F70-0611 Test Method for Determination of Particle Contribution of Gas Delivery System
. SEMI F71-1102 Test Method for Temperature Cycle of Gas Delivery System
. SEMI F72-0214 Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Payer of Wetted Surfaces of Passivated 316L Stainless Steel Components
. SEMI F73-0309 Test Method for Scanning Electron Microscopy (SEM) Evaluation of Wetted Surface Condition of Stainless Steel Components
. SEMI F74-1103 (Reapproved 0710) Test Method for the Performance and Evaluation of Metal Seal Designs for Use in Gas Delivery Systems
. SEMI F75-1102 (Reapproved 0309) Guide for Quality Monitoring of Ultrapure Water Used in Semiconductor Manufacturing
. SEMI F76-0303 (Reapproved 1110) Test Method for Evaluation of Particle Contribution from Gas System Components Exposed to Corrosive Gas
. SEMI F77-0703 (Reapproved 0310) Test Method for Electrochemical Critical Pitting Temperature Testing of Alloy Surfaces Used in Corrosive Gas Systems
. SEMI F78-0611 Practice for Gas Tungsten Arc (GTA) Welding of Fluid Distribution Systems in Semiconductor Manufacturing Applications
. SEMI F79-0710 Guide for Gas Compatibility with Silicon Used in Gas Distribution Components
. SEMI F80-0309 Test Method for Determination of Gas Change/Purge Efficiency of Gas Delivery System
. SEMI F81-0611 Specification for Visual Inspection and Acceptance of Gas Tungsten Arc (GTA) Welds in Fluid Distribution Systems in Semiconductor Manufacturing Applications
. SEMI F82-1012 Specification for Dimension of Mass Flow Controller/Mass Flow Meter for 1.125 Inch Type Surface Mount Gas Distribution Systems
. SEMI F83-1012 Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems
. SEMI F84-1012 Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems
. SEMI F85-1012 Specification for Dimension of One Port Components for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems
. SEMI F86-1012 Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems
. SEMI F87-1012 Specification for Dimension of Three Port Components (Except MFC/MFM) for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems
. SEMI F88-1012 Specification for Dimension of Standard Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution Systems
. SEMI F89-1012 Specification for Dimension of Compact Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution Systems
. SEMI F90-1012 Specification for Dimension of Standard Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems
. SEMI F91-1012 Specification for Dimension of Compact Size Two Port Components (Except MFC/MFM) for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems
. SEMI F92-1012 Specification for Dimension of Compact Size Three Port Components for 1.5 Inch Type Two Fastener Configuration Surface Mount Gas Distribution Systems
. SEMI F93-1012 Specification for Dimension of One Port Components for 1.5 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems
. SEMI F94-1012 Specification for Dimension of Two Port Components (Except MFC/MFM) for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution Systems
. SEMI F95-1012 Specification for Dimension of Three Port Components for 1.5 Inch Four Fastener Configuration Type Surface Mount Gas Distribution Systems
. SEMI F96-0704 Specification for Port Configuration of Canisters to Contain CVD Precursors
. SEMI F97-0305 Specification for Facility Package Integration, Monitoring and Control
. SEMI F98-0305 (Reapproved 1111) Guide for Treatment of Reuse Water in Semiconductor Processing
. SEMI F99-0705 Dimensional Specification of a Diaphragm Valve for a Metric PFA Tube
. SEMI F100-0705 Compliance Test Method for Minimum Flow Coefficient of Diaphragm Valve for Metric PFA Tube
. SEMI F101-1105 (Reapproved 1111) Test Methods for Determining Pressure Regulator Performance in Gas Distribution Systems
. SEMI F102-0306 (Reapproved 0513) Guide for Selecting Specifications for Dimension of Components for Surface Mount Gas Distribution Systems
. SEMI F103-0307 Specification for Size Ranges of Stainless Steel Canisters to Contain Liquid Chemicals
. SEMI F104-0312 Particle Test Method Guide for Evaluation of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
. SEMI F105-0314 Guide for Metallic Material Compatibility in Gas Distribution Systems
. SEMI F106-0308 (Reapproved 1012) Test Method for Determination of Leak Integrity of Gas Delivery Systems by Helium Leak Detector
. SEMI F107-0309 Guide for Process Equipment Adapter Plates
. SEMI F108-0310 Guide for Integration of Liquid Chemical Piping Components for Semiconductor, Flat Panel Display, and Solar Cell Manufacturing Applications
. SEMI F109-0212 Guide for Heater Systems Requirements
. SEMI F110-0712 Test Method for Mono-Dispersed Polystyrene Latex (PSL) Challenge of Liquid Filters
. SEMI F111-0413 Test Method for Equipment Fan Filter Unit (EFFU) Particle Removal
. SEMI F112-0613 Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Cavity Ring Down Spectroscopy (CRDS)
. SEMI S2-0712b Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
. SEMI S22-0712a Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment