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SEMI D16-0998
| Specification for Mechanical Interface Between Flat Panel Display Material Handling System and Tool Port |
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SEMI E1-1110
| Specification for Open Plastic and Metal Wafer Carriers |
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SEMI E1.9-1106E (Reapproved 0512)
| Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers |
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SEMI E6-0303
| Guide for Semiconductor Equipment Installation Documentation |
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SEMI E7-91 (Withdrawn 0312)
| Specification for Electrical Interfaces for the U.S. Only |
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SEMI E10-0312
| Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization |
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SEMI E12-0303 (Reapproved 0309)
| Standard for Standard Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers |
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SEMI E15-0698E2 (Reapproved 0310)
| Specification for Tool Load Port |
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SEMI E15.1-0305 (Reapproved 1110)
| Specification for 300 mm Tool Load Port |
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SEMI E16-0611
| Guideline for Determining and Describing Mass Flow Controller Leak Rates |
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SEMI E17-1011
| Guide for Mass Flow Controller Transient Characteristics Tests |
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SEMI E18-0211
| Guide for Temperature Specifications of the Mass Flow Controller |
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SEMI E19-0912
| Standard Mechanical Interface (SMIF) |
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SEMI E19.4-0912
| 200 mm Standard Mechanical Interface (SMIF) |
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SEMI E21-94 (Reapproved 0309)
| Cluster Tool Module Interface: Mechanical Interface and Wafer Transport Standard |
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SEMI E22-0697 (Reapproved 0309)
| Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume Standard |
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SEMI E23-1104 (Reapproved 0710)
| Specification for Cassette Transfer Parallel I/O Interface |
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SEMI E27-0611
| Standard for Mass Flow Controller and Mass Flow Meter Linearity |
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SEMI E28-1110
| Guide for Pressure Specifications of the Mass Flow Controller |
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SEMI E29-1110
| Terminology for the Calibration of Mass Flow Controllers and Mass Flow Meters |
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SEMI E33-1012
| Guide for Semiconductor Manufacturing Equipment Electromagnetic Compatibility (EMC) |
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SEMI E34-1110
| Safety Guideline for Mass Flow Device Removal and Shipment |
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SEMI E35-0312
| Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment |
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SEMI E43-1108
| Recommended Practice for Electrostatic Measurements on Objects and Surfaces |
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SEMI E45-1101 (Reapproved 0307)
| Test Method for the Determination of Inorganic Contamination from Minienvironments Using Vapor Phase Decomposition-Total Reflection X-Ray Spectroscopy (VPD-TXRF), VPD-Atomic Absorption Spectroscopy (VPD-AAS), or VPD/Inductively Coupled Plasma-Mass Spectro |
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SEMI E46-0307
| Test Method for the Determination of Organic Contamination from Minienvironments Using Ion Mobility Spectrometry (IMS) |
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SEMI E47-0301 (Reapproved 0512)
| Specification for 150 mm/200 mm Pod Handles |
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SEMI E47.1-1106 (Reapproved 0512)
| Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers |
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SEMI E48-1101 (Reapproved 1107)
| Specification for SMIF Indexer Volume Requirement |
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SEMI E49-1104 (Reapproved 1211)
| Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final Assemblies |
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SEMI E51-0200
| Guide for Typical Facilities Services and Termination Matrix |
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SEMI E52-0912
| Practice for Referencing Gases, Gas Mixtures, and Vaporizable Materials Used in Digital Mass Flow Controllers |
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SEMI E56-0309
| Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow Controllers |
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SEMI E57-0600 (Reapproved 1110)
| Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers |
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SEMI E62-1106 (Reapproved 0512)
| Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS) |
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SEMI E63-1104 (Reapproved 1110)
| Mechanical Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface |
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SEMI E64-1105 (Reapproved 0512)
| Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port |
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SEMI E66-0611
| Test Method for Determining Particle Contribution by Mass Flow Controllers |
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SEMI E67-1011
| Test Method for Determining Reliability of Mass Flow Controller |
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SEMI E68-0997 (Reapproved 0309)
| Test Method for Determining Warm-Up Time of Mass Flow Controllers |
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SEMI E69-0298 (Reapproved 0309)
| Test Method for Determining Reproducibility and Zero Drift for Thermal Mass Flow Controllers |
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SEMI E70-1103
| Guide for Tool Accommodation Process |
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SEMI E72-0600 (Reapproved 0305)
| Specification and Guide for 300 mm Equipment Footprint, Height, and Weight |
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SEMI E73-0301 (Reapproved 0413)
| Specification for Vacuum Pump Interfaces - Dry Pumps |
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SEMI E74-0301 (Reapproved 0413)
| Specification for Vacuum Pump Interfaces - Turbomolecular Pumps |
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SEMI E76-0299
| Guide for 300 mm Process Equipment Points of Connection to Facility Services |
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SEMI E77-1104 (Reapproved 0710)
| Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases |
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SEMI E78-0912
| Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment |
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SEMI E79-1106
| Specification for Definition and Measurement of Equipment Productivity |
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SEMI E80-0299 (Reapproved 0710)
| Test Method for Determining Attitude Sensitivity of Mass Flow Controllers (Mounting Position) |
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SEMI E83-0413
| Specification for PGV Mechanical Docking Flange |
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SEMI E84-1109
| Specification for Enhanced Carrier Handoff Parallel I/O Interface |
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SEMI E85-1108 (Reapproved 0513)
| Specification for Physical AMHS Stocker to Interbay Transport System Interoperability |
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SEMI E89-0707 (Reapproved 0313)
| Guide for Measurement System Analysis (MSA) |
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SEMI E92-0302E (Reapproved 0709)
| Specification for 300 mm Light Weight and Compact Box Opener/Loader to Tool-Interoperability Standard (Bolts/Light) |
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SEMI E99-1104E (Reapproved 0710)
| The Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behavior, and Services |
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SEMI E100-1104 (Reapproved 0710)
| Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 Inch or 230 mm Reticles |
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SEMI E101-1104 (Reapproved 0710)
| Guide for EFEM Functional Structure Model |
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SEMI E104-0303 (Reapproved 0211)
| Specification for Integration and Guideline for Calibration of Low-pressure Particle Monitor |
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SEMI E108-0307
| Test Method for the Assessment of Outgassing Organic Contamination from Minienvironments Using Gas Chromatography/Mass Spectroscopy |
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SEMI E110-1102 (Reapproved 0709)
| Guideline for Indicator Placement Zone and Switch Placement Volume of Load Port Operation Interface for 300 mm Load Ports |
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SEMI E111-1106
| Mechanical Specification for a 150 mm Reticle SMIF Pod (RSP150) Used to Transport and Store a 6 Inch Reticle |
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SEMI E112-1106
| Mechanical Specification for a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store Multiple 6 Inch Reticles |
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SEMI E113-0306 (Reapproved 0512)
| Specification for Semiconductor Processing Equipment RF Power Delivery Systems |
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SEMI E114-0302E (Reapproved 0309)
| Test Method for RF Cable Assemblies Used in Semiconductor Processing Equipment RF Power Delivery Systems |
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SEMI E115-0302E (Reapproved 0309)
| Test Method for Determining the Load Impedance and Efficiency of Matching Networks Used in Semiconductor Processing Equipment RF Power Delivery Systems |
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SEMI E116-0707E
| Specification for Equipment Performance Tracking |
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SEMI E117-1104 (Reapproved 0710)
| Specification for Reticle Load Port |
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SEMI E118-1104E
| Specification for Wafer ID Reader Communication Interface -- The Wafer ID Reader Functional Standard: Concepts, Behavior and Service |
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SEMI E119-0706 (Reapproved 0512)
| Mechanical Specification for Reduced-Pitch Front-Opening Box for Interfactory Transport of 300 mm Wafers |
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SEMI E124-1107
| Guide for Definition and Calculation of Overall Factory Efficiency (OFE) and Other Associated Factory-Level Productivity Metrics |
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SEMI E124-1107 (Reapproved 0313)
| Guide for Definition and Calculation of Overall Factory Efficiency (OFE) and Other Associated Factory-Level Productivity Metrics |
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SEMI E129-0912
| Guide to Assess and Control Electrostatic Charge in a Semiconductor Manufacturing Facility |
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SEMI E131-0304 (Reapproved 0310)
| Specification for the Physical Interface of an Integrated Measurement Module (IMM) into 300 mm Tools Using Bolts-M |
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SEMI E135-0704 (Reapproved 0512)
| Test Method for RF Generators to Determine Transient Response for RF Power Delivery Systems Used in Semiconductor Processing Equipment |
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SEMI E136-1104 (Reapproved 0512)
| Test Method for Determining the Output Power of RF Generators Used in Semiconductor Processing Equipment RF Power Delivery Systems |
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SEMI E137-0705 (Reapproved 1111)
| Guide for Final Assembly, Packaging, Transportation, Unpacking, and Relocation of Semiconductor Manufacturing Equipment |
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SEMI E140-0312
| Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems |
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SEMI E141-0705 (Reapproved 0211)
| Guide for Specification of Ellipsometer Equipment for Use in Integrated Metrology |
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SEMI E143-0306 (Reapproved 0512)
| Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at any phase Angle |
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SEMI E144-0312
| Specification for RF Air Interface Between RFID Tags in Carriers and RFID Readers in Semiconductor Production and Material Handling Equipment |
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SEMI E146-0306
| Test Method for the Determination of Particulate Contamination from Minienvironments used for Storage and Transport of Silicon Wafers |
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SEMI E149-0708
| Guide for Equipment Supplier-Provided Documentation for the Acquisition and Use of Manufacturing Equipment |
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SEMI E150-1107
| Guide for Equipment Training Best Practices |
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SEMI E152-0709
| Mechanical Specification of EUV Pod for 150 mm EUVL Reticles |
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SEMI E154-0612
| Mechanical Interface Specification for 450 mm Load Port |
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SEMI E156-0710
| Mechanical Specification for 450 mm AMHS Stocker to Transport Interface |
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SEMI E158-0912
| Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling |
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SEMI E159-0912
| Mechanical Specification for Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers |
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SEMI E161-0611
| Guide for Identification and Classification of Training Tiers |
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SEMI E162-0912
| Mechanical Interface Specification for 450 mm Front-Opening Shipping Box Load Port |
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SEMI E163-0212
| Guide for the Handling of Reticles and Other Extremely Electrostatic Sensitive (EES) Items Within Specially Designated Areas |
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SEMI E165-0712
| Guide for a Comprehensive Equipment Training System When Dedicated Training Equipment is not Available |
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SEMI E166-0513
| Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard |
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SEMI F47-0706 (Reapproved 0812)
| Specification for Semiconductor Processing Equipment Voltage Sag Immunity |
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SEMI G82-0301E (Reapproved 0706)
| Provisional Specification for 300 mm Load Port for Frame Cassettes in Backend Process |
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SEMI M31-0708
| Mechanical Specification for Front-Opening Shipping Box Used to Transport and Ship 300 mm Wafers |