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SEMI C1-0310
| Guide for the Analysis of Liquid Chemicals |
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SEMI C10-1109
| Guide for Determination of Method Detection Limits |
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SEMI C18-0708
| Specification for Acetic Acid |
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SEMI C19-0708
| Specification for Acetone |
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SEMI C20-0213
| Specification and Guide for Ammonium Fluoride 40% |
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SEMI C21-0708
| Specifications and Guideline for Ammonium Hydroxide |
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SEMI C22-0212
| Guide for Boron Tribromide |
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SEMI C23-0708
| Specifications for Buffered Oxide Etchants |
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SEMI C24-0301
| Specification for n-Butyl Acetate |
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SEMI C25-0312
| Specification for Dichloromethane (Methylene Chloride) |
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SEMI C26-0912
| Specification and Guide for Hexamethyldisilazane (HMDS) |
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SEMI C27-0708
| Specifications and Guidelines for Hydrochloric Acid |
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SEMI C28-0611
| Specifications for Hydrofluoric Acid |
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SEMI C29-1110
| Specifications and Guide for 4.9% Hydrofluoric Acid (10:1 v/v) |
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SEMI C30-1110
| Specifications for Hydrogen Peroxide |
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SEMI C31-0708
| Specification for Methanol |
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SEMI C32-0306 (Reapproved 0611)
| Specification for Methyl Ethyl Ketone |
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SEMI C33-0213
| Specifications for n-Methyl 2-Pyrrolidone |
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SEMI C34-0113
| Specification and Guide for Mixed Acid Etchants |
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SEMI C35-0708
| Specifications and Guideline for Nitric Acid |
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SEMI C36-1107
| Specifications for Phosphoric Acid |
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SEMI C37-0706 (Reapproved 0611)
| Specification for Phosphoric Etchants |
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SEMI C38-0212
| Guide for Phosphorus Oxychloride |
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SEMI C39-1110
| Specification for Potassium Hydroxide Pellets |
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SEMI C40-1110
| Specification for Potassium Hydroxide, 45% Solution |
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SEMI C41-0705
| Specifications and Guidelines for 2-Propanol |
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SEMI C42-1110
| Specification for Sodium Hydroxide Pellets |
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SEMI C43-1110
| Specification for Sodium Hydroxide, 50% Solution |
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SEMI C44-0708
| Specifications and Guidelines for Sulfuric Acid |
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SEMI C45-0309E
| Specification and Guideline for Tetraethylorthosilicate (TEOS) |
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SEMI C46-0812
| Guide for 25% Tetramethylammonium Hydroxide |
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SEMI C47-0812
| Guide for Trans 1,2 Dichloroethylene |
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SEMI C48-0812
| Specification and Guide for 1,1,1-Trichloroethane, Furnace Grade |
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SEMI C49-1110
| Guide for Trimethylborate |
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SEMI C50-1110
| Guide for Trimethylphosphite |
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SEMI C51-0706
| Specifications and Guidelines for Xylenes |
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SEMI C53-0704 (Reapproved 0312)
| Specifications for Dimethyl Sulfoxide (DMSO) [Grades 1 and 2] |
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SEMI C61-0707
| Specification for Bar-Code Container Identification |
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SEMI C62-0309
| Specification for Progen Precursors Used in Low K CVD Processes |
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SEMI C64-0308
| SEMI Statistical Guidelines for Ship To Control |
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SEMI C65-0308
| Guideline for Trimethylsilane (3MS), 99.995% Quality |
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SEMI C66-0308
| Guidelines for Trimethylaluminium (TMAI), 99.5% Quality |
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SEMI C67-0811
| Guide for Hafnium Amides |
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SEMI C68-0811
| Guide for Zirconium Amides |
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SEMI C69-0611
| Test Method for the Determination of Surface Areas of Polymer Pellets |
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SEMI C72-0811
| Guide for Propylene-Glycol-Mono-Methyl-Ether (PGME), Propylene-Glycol-Mono-Methyl-Ether-Acetate (PGMEA) and the Mixture 70wt% PGME/30wt% PGMEA |
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SEMI C73-0811
| Guide for Hafnium Chloride |
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SEMI C74-0811
| Guide for Hafnium Tert-Butoxide |
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SEMI C75-0811
| Guide for Tetrakis(Dimethylamino)Titanium |
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SEMI C76-0811
| Guide for Zirconium Tert-Butoxide |
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SEMI C77-0912
| Test Method for Determining the Counting Efficiency of Liquid-Borne Particle Counters for Which the Minimum Detectable Particle Size is Between 30 nm and 100 nm |
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SEMI C78-0113
| Test Method for Determining Roughness of Polymer Surfaces Used in Ultrapure Water and Liquid Chemical Distribution Systems by Atomic Force Microscopy |
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SEMI C79-0113
| Guide to Evaluate the Efficacy of Sub-15 nm Filters Used in Ultrapure Water (UPW) Distribution Systems |
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SEMI C80-0113
| Guide for Tetrakis(Dimethylamino) Silane (TDMAS) |
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SEMI C81-0113
| Guide for Tris(Dimethylamino) Silane (3DMAS) |