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SEMI C3-0413
| Specifications for Gases |
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SEMI C3.2-0611
| Specification for Arsine (AsH3) in Cylinders, 99.94% Quality |
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SEMI C3.6-0710
| Specification for Phosphine (PH3) in Cylinders, 99.98% Quality |
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SEMI C3.12-1109
| Specification for Ammonia (NH3) in Cylinders, 99.998% Quality |
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SEMI C3.20-0309
| Specification for Helium (He), in Cylinders, 99.9995% |
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SEMI C3.24-0309
| Specification for Sulfur Hexafluoride (SF6) in Cylinders, 99.97% Quality |
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SEMI C3.26-0301 (Withdrawn 0312)
| Specification for Tungsten Hexafluoride (WF6) in Cylinders, 99.8% Quality |
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SEMI C3.27-1102 (Reapproved 1011)
| Specification for Boron Trifluoride (BF3) in Cylinders, 99.0% Quality |
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SEMI C3.32-1109
| Specification for Chlorine (Cl2), 99.996% Quality |
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SEMI C3.33-92 (Withdrawn 0312)
| Standard for Boron Trichloride (BCl3) (Provisional) |
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SEMI C3.34-1109
| Specification for Disilane (Si2H6) in Cylinders, 97% Quality |
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SEMI C3.35-1109E
| Specification for Hydrogen Chloride (HCI), 99.997% Quality |
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SEMI C3.37-1109
| Specification for Hexafluoroethane (C2F6), 99.97% Quality |
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SEMI C3.39-1011
| Specification for Nitrogen Trifluoride (NF3), 99.98% |
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SEMI C3.40-1011
| Specification for Carbon Tetrafluoride (CF4), 99.997% Quality |
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SEMI C3.47-1011
| Specification for Hydrogen Bromide (HBr), 99.98% Quality |
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SEMI C3.51-1101 (Withdrawn 0312)
| Specification for Boron Trichloride (BCl3), 99.98% Quality |
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SEMI C3.52-0200 (Withdrawn 0312)
| Standard for Tungsten Hexafluoride, 99.996% Quality |
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SEMI C3.54-0200E (Withdrawn 1011)
| Gas Purity Guideline for Silane (SiH4) |
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SEMI C3.55-1011
| Specification for Silane (SiH4), Bulk, 99.994% Quality |
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SEMI C3.56-0312
| Specification for Diborane Mixtures |
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SEMI C3.57-0312
| Specification for Carbon Dioxide, CO2, Electronic Grade in Cylinders |
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SEMI C3.58-1011
| Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% Quality |
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SEMI C6.2-93 (Reapproved 1111)
| Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas |
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SEMI C6.3-89 (Reapproved 1111)
| Particle Specification for Grade 20/0.2 Hydrogen (H2) Delivered as Pipeline Gas |
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SEMI C6.4-90 (Reapproved 1111)
| Particle Specification for Grade 20/0.02 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas |
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SEMI C6.5-90 (Reapproved 1111)
| Particle Specification for Grade 10/0.2 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas |
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SEMI C6.6-90 (Reapproved 1111)
| Particle Specification for Grade 10/0.1 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas |
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SEMI C6.7-93 (Reapproved 1111)
| Particle Specification for Grade 10/0.2 Nitrogen in High Pressure Gas Cylinders |
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SEMI C9.1-0212
| Guide for Analysis of Uncertainties in Gravimetrically Prepared Gas Mixtures |
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SEMI C10-1109
| Guide for Determination of Method Detection Limits |
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SEMI C14-95 (Reapproved 0309)
| Test Method for Particle Shedding Performance of 25 cm Gas Filter Cartridges |
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SEMI C15-0212
| Test Method for ppm and ppb Humidity Standards |
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SEMI C52-0301 (Reapproved 0312)
| Specification for the Shelf Life of a Specialty Gas |
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SEMI C54-1103 (Reapproved 0211)
| Specifications and Guidelines for Oxygen |
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SEMI C55-1104 (Reapproved 0211)
| Specification for Liquid Carbon Dioxide (CO2) Used in Near Critical, Critical and Supercritical Applications, >/ 99.99% Quality |
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SEMI C56-0305 (Reapproved 0211)
| Specifications and Guidelines for Dichlorosilane (SiH2Cl2) |
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SEMI C57-0305 (Reapproved 0211)
| Specifications and Guidelines for Argon |
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SEMI C58-0305 (Reapproved 0211)
| Specifications and Guidelines for Hydrogen |
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SEMI C59-1104 (Reapproved 0211)
| Specifications and Guidelines for Nitrogen |
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SEMI C60-0305 (Reapproved 0211)
| Specifications and Guidelines for Nitrous Oxide (N2O) |
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SEMI C70-0611
| Specifications for Tungsten Hexafluoride (WF6) |
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SEMI C71-0611
| Specification and Guide for Boron Trichloride (BCI3) |