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. SEMI C3-0317 Specification for Gases
. SEMI C3.2-0611 Specification for Arsine (AsH3) in Cylinders, 99.94% Quality
. SEMI C3.6-0710 (Reapproved 0815) Specification for Phosphine (PH3) in Cylinders, 99.98% Quality
. SEMI C3.12-0116 Specification for Ammonia (NH3) in Cylinders, 99.998% Quality
. SEMI C3.20-0414 Specification for Helium (He), in Cylinders, 99.9995%
. SEMI C3.24-0414 Specification for Sulfur Hexafluoride (SF6) in Cylinders, 99.97% Quality
. SEMI C3.27-1102 (Reapproved 1011) Specification for Boron Trifluoride (BF3) in Cylinders, 99.0% Quality
. SEMI C3.32-0614 Specification for Chlorine (Cl2), 99.996% Quality
. SEMI C3.34-0116 Specification for Disilane (Si2H6) in Cylinders, 97% Quality
. SEMI C3.35-1109E (Reapproved 0815) Specification for Hydrogen Chloride (HCI), 99.997% Quality
. SEMI C3.37-0614 Specification for Hexafluoroethane (C2F6), 99.97% Quality
. SEMI C3.39-1011 Specification for Nitrogen Trifluoride (NF3), 99.98%
. SEMI C3.40-1011 Specification for Carbon Tetrafluoride (CF4), 99.997% Quality
. SEMI C3.47-1011 Specification for Hydrogen Bromide (HBr), 99.98% Quality
. SEMI C3.55-1011 Specification for Silane (SiH4), Bulk, 99.994% Quality
. SEMI C3.56-0312 Specification for Diborane Mixtures
. SEMI C3.57-0312 Specification for Carbon Dioxide, CO2, Electronic Grade in Cylinders
. SEMI C3.58-1011 Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% Quality
. SEMI C6.2-93 (Reapproved 1111) Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas
. SEMI C6.3-89 (Reapproved 1111) Particle Specification for Grade 20/0.2 Hydrogen (H2) Delivered as Pipeline Gas
. SEMI C6.4-90 (Reapproved 1111) Particle Specification for Grade 20/0.02 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas
. SEMI C6.5-90 (Reapproved 1111) Particle Specification for Grade 10/0.2 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas
. SEMI C6.6-90 (Reapproved 1111) Particle Specification for Grade 10/0.1 Nitrogen (N2) and Argon (Ar) Delivered as Pipeline Gas
. SEMI C6.7-93 (Reapproved 1111) Particle Specification for Grade 10/0.2 Nitrogen in High Pressure Gas Cylinders
. SEMI C9.1-0212 Guide for Analysis of Uncertainties in Gravimetrically Prepared Gas Mixtures
. SEMI C14-95 (Reapproved 0913) Test Method for Particle Shedding Performance of 25 cm Gas Filter Cartridges
. SEMI C15-0616 Test Method for ppm and ppb Humidity Standards
. SEMI C52-0301 (Reapproved 0312) Specification for the Shelf Life of a Specialty Gas
. SEMI C54-1116 Specification for Oxygen
. SEMI C55-1104 (Reapproved 0211) Specification for Liquid Carbon Dioxide (CO2) Used in Near Critical, Critical and Supercritical Applications, >/ 99.99% Quality
. SEMI C56-1116 Specification for Dichlorosilane
. SEMI C57-0317 Specification for Argon
. SEMI C58-1116 Specification for Hydrogen
. SEMI C59-0317 Specification for Nitrogen
. SEMI C60-0317 Specification for Nitrous Oxide
. SEMI C70-1116 Specification for Tungsten Hexafluoride
. SEMI C71-0815 Specification and Guide for Boron Trichloride (BCI3)
. SEMI C88-0815 Specification for Dimensions of Sandwich Components for 1.125 Inch Type Surface Mount Gas Distribution Systems
. SEMI C91-1115 Test Method for Determination of Moisture Dry-Down Characteristics of Gas Delivery Components
. SEMI C92-0216 Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used in Corrosive Gas Systems by Use of a Ferric Chloride Solution