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SEMI D27-1000
| Guide for Flat Panel Display Equipment Communication Interfaces |
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SEMI E4-0699 (Reapproved 0612)
| SEMI Equipment Communications Standard 1 Message Transfer (SECS-I) |
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SEMI E5-0712
| SEMI Equipment Communications Standard 2 Message Content (SECS-II) |
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SEMI E30-0611
| Generic Model for Communications and Control of Manufacturing Equipment (GEM) |
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SEMI E30.1-0309
| Inspection and Review Specific Equipment Model (ISEM) |
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SEMI E30.5-0302 (Reapproved 0308)
| Specification for Metrology Specific Equipment Model (MSEM) |
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SEMI E32-0997
| Material Movement Management (MMM) |
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SEMI E36-0704
| Semiconductor Equipment Manufacturing Information Tagging Specification |
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SEMI E37-0413
| High-Speed SECS Message Services (HSMS) Generic Services |
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SEMI E39-0703 (Reapproved 1109)
| Object Services Standard: Concepts, Behavior, and Services |
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SEMI E40-0312
| Standard for Processing Management |
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SEMI E41-95
| Exception Management (EM) Standard |
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SEMI E42-0704
| Recipe Management Standard: Concepts, Behavior, and Message Services |
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SEMI E53-0704
| Event Reporting |
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SEMI E54-0413
| Sensor/Actuator Network Standard |
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SEMI E54.3-0698 (Reapproved 1110)
| Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device |
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SEMI E54.4-1111
| Standard for Sensor/Actuator Network Communications for DeviceNet |
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SEMI E54.8-0309
| Specification for Sensor/Actuator for Network Communications for PROFIBUS-DP |
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SEMI E54.9-0708
| Specification for Sensor/Actuator Network Communication for Modbus/TCP Over TCP/IP |
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SEMI E54.10-0600 (Reapproved 1111)
| Specification for Sensor/Actuator Network Specific Device Model for an In-Situ Particle Monitor Device |
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SEMI E54.11-1106 (Reapproved 1211)
| Specific Device Model for Endpoint Devices |
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SEMI E54.12-0701E (Reapproved 1211)
| Specification for Sensor/Actuator Network Communications for CC-Link |
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SEMI E54.13-1011
| Specification for Sensor/Actuator Network Communications for Ethernet/IP(TM) |
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SEMI E54.14-0309
| Specification for Sensor/Actuator Network Communications for PROFINET |
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SEMI E54.15-1107
| Sensor/Actuator Network Communication Specification for SafetyBUS p |
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SEMI E54.16-1106 (Reapproved 1211)
| Specfication for Sensor/Actuator Network Communications for LONWORKS |
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SEMI E54.17-0812
| Specification of Sensor/Actuator Network for A-LINK |
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SEMI E54.18-1106 (Reapproved 1211)
| Specification for Sensor/Actuator Network Specific Device Model for Vacuum Pump Device |
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SEMI E54.19-0308
| Specification for Sensor/Actuator Network for MECHATROLINK |
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SEMI E54.20-1108
| Standard for Sensor/Actuator Network Communications for EtherCAT |
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SEMI E54.21-1110
| Specification for Sensor Actuator Network for Motionnet Communication |
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SEMI E54.23-0513
| Specification for Sensor/Actuator Network Communications for CC-Link IE Field Network |
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SEMI E58-0703
| Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services |
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SEMI E81-0600 (Reapproved 0307)
| Provisional Specification for CIM Framework Domain Architecture |
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SEMI E82-1106 (Reapproved 0612)
| Specification for Interbay/Intrabay AMHS SEM (IBSEM) |
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SEMI E86-0200
| Provisional Specification for CIM Framework Factory Labor Component |
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SEMI E87-0312
| Specification for Carrier Management (CMS) |
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SEMI E88-0307 (Reapproved 0612)
| Specification for AMHS Storage SEM (Stocker SEM) |
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SEMI E90-0312
| Specification for Substrate Tracking |
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SEMI E91-0600 (Reapproved 1109)
| Specification for Prober Specific Equipment Model (PSEM) |
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SEMI E94-0312
| Specification for Control Job Management |
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SEMI E95-1101 (Reapproved 0307)
| Specification for Human Interface for Semiconductor Manufacturing Equipment |
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SEMI E96-1101 (Reapproved 0307)
| Guide for CIM Framework Technical Architecture |
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SEMI E97-0200A (Reapproved 0307)
| Provisional Specification for CIM Framework Global Declarations and Abstract Interfaces |
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SEMI E98-0309
| Provisional Standard for the Object-Based Equipment Model (OBEM) |
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SEMI E102-0600 (Reapproved 0706)
| Provisional Specification for CIM Framework Material Transport and Storage Component |
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SEMI E105-0701
| Provisional Specification for CIM Framework Scheduling Component |
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SEMI E107-1102 (Reapproved 0710)
| Specification of Electric Failure LInk Data Format for Yield Management System |
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SEMI E109-1110
| Specification for Reticle and Pod Management (RPMS) |
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SEMI E116-0707E
| Specification for Equipment Performance Tracking |
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SEMI E118-1104E
| Specification for Wafer ID Reader Communication Interface -- The Wafer ID Reader Functional Standard: Concepts, Behavior and Service |
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SEMI E120-0310
| Specification for the Common Equipment Model (CEM) |
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SEMI E121-0305 (Reapproved 1111)
| Guide for Style and Usage of XML for Semiconductor Manufacturing Applications |
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SEMI E122-0703 (Reapproved 1109)
| Standard for Tester Equipment Specific Equipment Model (TSEM) |
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SEMI E123-0703 (Reapproved 1109)
| Standard for Handler Equipment Specific Equipment Model (HSEM) |
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SEMI E125-0710
| Specification for Equipment Self Description (EqSD) |
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SEMI E126-0708
| Specification for Equipment Quality Information Parameters (EQIP) |
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SEMI E127-0308
| Specification for Integrated Measurement Module Communications: Concepts, Behavior, and Services (IMMC) |
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SEMI E128-0310
| Specification for XML Message Structures |
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SEMI E130-1104 (Reapproved 0710)
| Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) |
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SEMI E132-0310E2
| Specification for Equipment Client Authentication and Authorization |
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SEMI E133-0212
| Specification for Automated Process Control Systems Interface |
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SEMI E134-0313
| Specification for Data Collection Management |
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SEMI E138-0709
| XML Semiconductor Common Components |
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SEMI E139-1211
| Specification for Recipe and Parameter Management (RaP) |
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SEMI E142-0211
| Specification for Substrate Mapping |
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SEMI E145-0213
| Classification for Measurement Unit Symbols in XML |
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SEMI E147-0307E
| Guide for Equipment Data Acquisition (EDA) |
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SEMI E148-1109
| Specification for Time Synchronization and Definition of the TS-Clock Object |
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SEMI E151-1211
| Guide for Understanding Data Quality |
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SEMI E153-0310
| Specification for AMHS SEM (AMHS SEM) |
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SEMI E157-0611
| Specification for Module Process Tracking |
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SEMI E160-1211
| Specification for Communication of Data Quality |
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SEMI E164-0313
| Specification for EDA Common Metadata |
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SEMI G81-0307
| Specification for Map Data Items |