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SEMI International Standards Publications List

The following standards are available for download.

To purchase, go to Download Individual SEMI Standards page, click on the appropriate volume link, and then click on the standard number to purchase and download the standard.

If you need assistance, please contact SEMI Customer Service or by phone at 1.408.943.6901 (Mon - Fri 0800 - 01700).
Publishing Cycle
Standard #TitleVolume(s)
SEMI C92-0216 Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used in Corrosive Gas Systems by Use of a Ferric Chloride Solution Gases
SEMI M53-0216 Practice for Calibrating Scanning Surface Inspection Systems Using Certified Depositions of Monodispere Reference Spheres on Unpatterned Semiconductor Wafer Surfaces Materials
SEMI T8-1110 (Reapproved 0216) Specification for Marking of Glass Flat Panel Display Substrates with a Two-Dimensional Matrix Code Symbol Traceability
SEMI T9-1110 (Reapproved 0216) Specification for Marking of Metal Lead-Frame Strips with a Two-Dimensional Data Matrix Code Symbol Traceability
NOTE 1: Subordinate documents that are not independent in nature are grouped and sold with the main document (i.e., SEMI M1.1, SEMI M1.2, etc. are available as a package with SEMI M1).

NOTE2: All documents are required to be ballotted for re-approval every 5 years. If there are no technical changes to the documents, the designation remains the same with a comment added stating the month and year it was re-approved. Re-approvals may contain minor editorial changes. If so, the sections that were editorially changed are listed in the abstract for the document.