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SEMI International Standards Publications List
The following standards are available for download.
To purchase, go to
Download Individual SEMI Standards page,
click on the appropriate volume link, and then click on the standard number to purchase and download the standard.
If you need assistance, please contact
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or by phone at 1.408.943.6901 (Mon - Fri 0800 - 01700).
Test Method for Determining Roughness of Polymer Surfaces Used in Ultrapure Water and Liquid Chemical Distribution Systems by Contact Profilometry
SEMI D9-0303 (Reapproved 0515)
Terminology for FPD Substrates
Flat Panel Display
Specification for Predictive Carrier Logistics (PCL)
Equipment Automation Software
Specification for PGV Mechanical Docking Flange
Equipment Automation Hardware
Specifications for Silicon Epitaxial Wafers
Safety Guideline for Evaluating Personnel and Evaluating Company Qualifications
Subordinate documents that are not independent in nature are grouped and sold with the main document (i.e., SEMI M1.1, SEMI M1.2, etc. are available as a package with SEMI M1).
All documents are required to be ballotted for re-approval every 5 years. If there are no technical changes to the documents, the designation remains the same with a comment added stating the month and year it was re-approved. Re-approvals may contain minor editorial changes. If so, the sections that were editorially changed are listed in the abstract for the document.
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