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SEMI International Standards Publications List
The following standards are available for download.
To purchase, go to
Download Individual SEMI Standards page,
click on the appropriate volume link, and then click on the standard number to purchase and download the standard.
If you need assistance, please contact
SEMI Customer Service
or by phone at 1.408.943.6901 (Mon - Fri 0800 - 01700).
Terminology for Identification of Structures and Features Seen on Gallium Arsenide Wafers
Specification for Compound Semiconductor Epitaxial Wafers
Specification for Sapphire Substrates to use for Compound Semiconductor Epitaxial Wafers
Specification for Polished Monocrystalline Gallium Antimonide Wafers
Specification for Polished Monocrystalline Gallium Arsenide Wafers
SEMI S19-0311 (Reapproved 0816)
Safety Guideline for Training of Manufacturing Equipment Installation, Maintenance and Service Personnel
Subordinate documents that are not independent in nature are grouped and sold with the main document (i.e., SEMI M1.1, SEMI M1.2, etc. are available as a package with SEMI M1).
All documents are required to be ballotted for re-approval every 5 years. If there are no technical changes to the documents, the designation remains the same with a comment added stating the month and year it was re-approved. Re-approvals may contain minor editorial changes. If so, the sections that were editorially changed are listed in the abstract for the document.
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