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SEMI International Standards Publications List

The following standards are available for download.

To purchase, go to Download Individual SEMI Standards page, click on the appropriate volume link, and then click on the standard number to purchase and download the standard.

If you need assistance, please contact SEMI Customer Service or by phone at 1.408.943.6901 (Mon - Fri 0800 - 01700).
 
Publishing Cycle
 
Standard #TitleVolume(s)
SEMI 3D10-0814 Guide to Describing Materials Properties for Intermediate Wafers for Use in a 300 mm 3DS-IC Wafer Stack 3D-IC
SEMI E10-0814 Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization Equipment Automation Hardware
SEMI E154-0814 Mechanical Interface Specification for 450 mm Load Port Equipment Automation Hardware
SEMI E166-0814 Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard Equipment Automation Hardware
SEMI E79-0814 Specification for Definition and Measurement of Equipment Productivity Equipment Automation Hardware
SEMI G92-0814 Specification for Tape Frame Cassette for 450 mm Wafer Packaging
SEMI HB1-0814 Specifications for Sapphire Wafers Intended for Use for Manufacturing High Brightness-Light Emitting Diode Devices HB-LED
SEMI M55-0814 Specification for Polished Monocrystalline Silicon Carbide Wafers Materials
NOTE 1: Subordinate documents that are not independent in nature are grouped and sold with the main document (i.e., SEMI M1.1, SEMI M1.2, etc. are available as a package with SEMI M1).

NOTE2: All documents are required to be ballotted for re-approval every 5 years. If there are no technical changes to the documents, the designation remains the same with a comment added stating the month and year it was re-approved. Re-approvals may contain minor editorial changes. If so, the sections that were editorially changed are listed in the abstract for the document.