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SEMI International Standards Publications List

The following standards are available for download.

To purchase, go to Download Individual SEMI Standards page, click on the appropriate volume link, and then click on the standard number to purchase and download the standard.

If you need assistance, please contact SEMI Customer Service or by phone at 1.408.943.6901 (Mon - Fri 0800 - 01700).
 
Publishing Cycle
 
Standard #TitleVolume(s)
SEMI M10-0816 Terminology for Identification of Structures and Features Seen on Gallium Arsenide Wafers Materials
SEMI M42-0816 Specification for Compound Semiconductor Epitaxial Wafers Materials
SEMI M65-0816 Specification for Sapphire Substrates to use for Compound Semiconductor Epitaxial Wafers Materials
SEMI M75-0816 Specification for Polished Monocrystalline Gallium Antimonide Wafers Materials
SEMI M9-0816 Specification for Polished Monocrystalline Gallium Arsenide Wafers Materials
SEMI S19-0311 (Reapproved 0816) Safety Guideline for Training of Manufacturing Equipment Installation, Maintenance and Service Personnel Safety Guidelines
NOTE 1: Subordinate documents that are not independent in nature are grouped and sold with the main document (i.e., SEMI M1.1, SEMI M1.2, etc. are available as a package with SEMI M1).

NOTE2: All documents are required to be ballotted for re-approval every 5 years. If there are no technical changes to the documents, the designation remains the same with a comment added stating the month and year it was re-approved. Re-approvals may contain minor editorial changes. If so, the sections that were editorially changed are listed in the abstract for the document.