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SEMI International Standards Publications List

The following standards are available for download.

To purchase, go to Download Individual SEMI Standards page, click on the appropriate volume link, and then click on the standard number to purchase and download the standard.

If you need assistance, please contact SEMI Customer Service or by phone at 1.408.943.6901 (Mon - Fri 0800 - 01700).
Publishing Cycle
Standard #TitleVolume(s)
SEMI 3D12-0315 Guide for Measuring Flatness and Shape of Low Stiffness Wafers 3D-IC
SEMI F39-0315 Guide for Chemical Blending Systems Facilities
SEMI G81-0307 (Reapproved 0315) Specification for Map Data Items Equipment Automation Software
SEMI G81-0307 (Reapproved 0315) Specification for Map Data Items Packaging
SEMI G92-0315 Specification for Tape Frame Cassette for 450 mm Wafer Packaging
SEMI HB1-0315 Specifications for Sapphire Wafers Intended for Use for Manufacturing High Brightness-Light Emitting Diode Devices HB-LED
SEMI M55-0315 Specification for Polished Monocrystalline Silicon Carbide Wafers Materials
SEMI M68-0315 Practice for Determining Wafer Near-Edge Geometry from a Measured Height Data Array Using a Curvature Metric, ZDD Materials
NOTE 1: Subordinate documents that are not independent in nature are grouped and sold with the main document (i.e., SEMI M1.1, SEMI M1.2, etc. are available as a package with SEMI M1).

NOTE2: All documents are required to be ballotted for re-approval every 5 years. If there are no technical changes to the documents, the designation remains the same with a comment added stating the month and year it was re-approved. Re-approvals may contain minor editorial changes. If so, the sections that were editorially changed are listed in the abstract for the document.