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SEMI International Standards Publications List

The following standards are available for download.

To purchase, go to Download Individual SEMI Standards page, click on the appropriate volume link, and then click on the standard number to purchase and download the standard.

If you need assistance, please contact SEMI Customer Service or by phone at 1.408.943.6900 (Mon - Fri 0800 - 01700).
Publishing Cycle
Standard #TitleVolume(s)
SEMI A1-0918 Specification for Horizontal Communication (HC) Between Equipment for Factory Automation System Automation Technology
SEMI C27-0918 Specification and Guide for Hydrochloric Acid Process Chemicals
SEMI F40-0699E (Reapproved 0918) Practice for Preparing Liquid Chemical Distribution Components for Chemical Testing Facilities
SEMI F56-0918 Test Method for Determining Steady-State Supply Voltage Effects for Mass Flow Controllers Facilities
SEMI F63-0918 Guide for Ultrapure Water Used in Semiconductor Processing Facilities
SEMI M1-0918 Specification for Polished Single Crystal Silicon Wafers Materials
SEMI M49-0918 Guide for Specifying Geometry Measurement Systems for Silicon Wafers for the 130 nm to 16 nm Technology Generations Materials
NOTE 1: Subordinate documents that are not independent in nature are grouped and sold with the main document (i.e., SEMI M1.1, SEMI M1.2, etc. are available as a package with SEMI M1).

NOTE2: All documents are required to be ballotted for re-approval every 5 years. If there are no technical changes to the documents, the designation remains the same with a comment added stating the month and year it was re-approved. Re-approvals may contain minor editorial changes. If so, the sections that were editorially changed are listed in the abstract for the document.