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SEMI International Standards Publications List
The following standards are available for download.
To purchase, go to
Download Individual SEMI Standards page,
click on the appropriate volume link, and then click on the standard number to purchase and download the standard.
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Guide to Describing Materials Properties for Intermediate Wafers for Use in a 300 mm 3DS-IC Wafer Stack
Mechanical Interface Specification for 450 mm Load Port
Equipment Automation Hardware
Specifications for Sapphire Wafers Intended for Use for Manufacturing High Brightness-Light Emitting Diode Devices
Subordinate documents that are not independent in nature are grouped and sold with the main document (i.e., SEMI M1.1, SEMI M1.2, etc. are available as a package with SEMI M1).
All documents are required to be ballotted for re-approval every 5 years. If there are no technical changes to the documents, the designation remains the same with a comment added stating the month and year it was re-approved. Re-approvals may contain minor editorial changes. If so, the sections that were editorially changed are listed in the abstract for the document.
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