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SEMI M6-1108 - Specification for Silicon Wafers for Use as Photovoltaic Solar Cells

Volume(s): Materials
Language: English
Type: Single Standards Download (.pdf)
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This standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 29, 2008. It was available at www.semi.org in June 2007. Originally published in 1981; previously published March 2007.


NOTICE: This document replaces the previous version of SEMI M6 along with SEMI M6.1, SEMI M6.2, SEMI M6.3, SEMI M6.4 and SEMI M6.5 in their entirety.


This specification covers the requirements for silicon wafers for use in photovoltaic (PV) solar cell manufacture. The dimensional characteristics, crystalline defects and commonly used wafer electronic properties are described. Two classes of crystalline silicon materials are recognized: monocrystalline and multicrystalline.

Referenced SEMI Standards

SEMI M1 — Specifications for Polished Monocrystalline Silicon Wafers

SEMI M59 — Terminology for Silicon Technology

SEMI MF26 — Test Methods for Determining the Orientation of a Semiconductive Single Crystal

Revision History

SEMI M6-1108 (technical revision)

SEMI M6-0707 (technical revision)

SEMI M6-0307 (technical revision)

SEMI M6-1000 (technical revision)

SEMI M6-82 (first published)

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