This standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www.semi.org in February 2007. Originally published in 1994; previously published November 2005.

This document specifies requirements for virgin silicon premium wafers with nominal diameter from 150–300 mm used for particle counting, metal contamination monitoring, and measuring pattern resolution in the photolithography process in semiconductor manufacturing. The premium wafer has tighter specification values in some specific items for the specific usage, and looser or equal specification values in other items than a prime wafer has.

SEMI M1 — Specifications for Polished Mono-crystalline Silicon Wafers

SEMI M18 — Guide for Developing Specification Forms for Order Entry of Silicon Wafers

SEMI M45 — Provisional Specification for 300 mm Wafer Shipping System

SEMI M59 — Terminology for Silicon Technology

SEMI M24-0307 (technical revision)

SEMI M24-1105 (technical revision)

SEMI M24-1103 (technical revision)

SEMI M24-1101 (technical revision)

SEMI M24-0301E (editorial revision)

SEMI M24-0301 (technical revision)

SEMI M24-0999E (editorial revision)

SEMI M24-0999 (technical revision)

SEMI M24-0299E (editorial revision)

SEMI M24-0299 (technical revision)

SEMI M24-1296 (technical revision)

SEMI M24-94 (first published)