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SEMI G82-0301E (Reapproved 0706) - Provisional Specification for 300 mm Load Port for Frame Cassettes in Backend Process

Volume(s): Equipment Automation Hardware;Packaging
Language: English
Type: Single Standards Download (.pdf)
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This standard was technically approved by the global Assembly & Packaging Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 16, 2006. It was available at www.semi.org in June 2006. Originally published March 2001.


This specification defines dimensional requirements for the load port of frame cassette for 300 mm wafer in backend process equipment. It is intended to promote a uniform physical interface between equipment and the factory, to facilitate the use of automated frame cassette transport systems, and/or to meet ergonomic requirements for manually loaded equipment.

Referenced SEMI Standards

SEMI E15 — Specification for Tool Load Port

SEMI E15.1 — Specification for 300 mm Load Port

SEMI E57 — Mechanical Specification for kinematic Couplings Used to Align and Support 300 mm Wafer Carriers

SEMI E64 — Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port

SEMI G77 — Specification for Frame Cassette for 300 mm Wafers

Revision History

SEMI G82-0301E (Reapproved 0706)

SEMI G82-0301E (editorial revision)

SEMI G82-0301 (first published)

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