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SEMI F58-0708 - Test Method for Determination of Moisture Dry-Down Characteristics of Surface-Mounted and Conventional Gas Delivery Systems by Atmospheric Pressure Ionization Mass Spectrometry (APIMS)

Volume(s): Facilities
Language: English
Type: Single Standards Download (.pdf)
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INACTIVE - Not currently supported by the technical committee.


This standard was technically approved by the global Gases Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on May 13, 2008. It was available at www.semi.org in June 2008. Originally published October 2000.


This document describes the procedure for determination of the moisture dry-down characteristics (quantity of removable moisture) of surface mount and conventional gas distribution systems (integrated gas distribution systems). APIMS is currently the method of choice for such dynamic tests because it is the commercially available technique capable of ppt moisture analysis with the fastest response time. This test method may provide guidelines for the application of other techniques with similar detection limits and response time to APIMS which may not be commercially available at this time. The results of this test can be used for qualitative ranking of gas delivery system based on the design. It can also be used by a sufficiently sophisticated user as input for numerical simulation of a gas distribution system behavior.

Referenced SEMI Standards

SEMI C15 — Test Method for ppm and ppb Humidity Standards

SEMI F27 — Test Method for Moisture Interaction and Content of Gas Distribution Systems and Components by Atmospheric Pressure Ionization Mass Spectrometry (APIMS)

SEMI F33 — Method for Calibration of Atmospheric Pressure Ionization Mass Spectrometer (APIMS)

Revision History

SEMI F58-0708 (technical revision)

SEMI F58-1000 (first published)

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