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SEMI F19-0304 - Specification for the Surface Condition of the Wetted Surfaces of Stainless Steel Components

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Language: English
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This specification was technically approved by the global Gases Committee and is the direct responsibility of the North American Gases Committee. Current edition approved by the North American Regional Standards Committee on December 4, 2003. Initially available at www.semi.org February 2004; to be published March 2004. Originally published in 1995.


NOTICE: This document was completely rewritten in 2004.


The purpose of this specification is to provide a standard for the quality of the wetted surfaces of stainless steel components used in the chemical (gas and liquid) distribution systems of semiconductor manufacturing facilities. This specification defines the wetted surface characterization requirements and the finish acceptance criteria for tubing and components fabricated in stainless steel per SEMI F20 and intended to control and/or contain gases and liquids used in semiconductor manufacturing. The surface characterization tests to be performed are specified herein, and the existing standards for performing these tests are referenced. Terms specific to this technology are either listed herein as they relate to the acceptance criteria of this specification or are defined in the referenced documents as they relate to a specific test method.

Referenced SEMI Standards

SEMI F20 — Specification for 316L Stainless Steel Bar, Extruded Shapes, Plate, and Investment Castings for Components Used in High Purity Semiconductor Manufacturing Applications

SEMI F37 — Method for Determination of Surface Roughness Parameters for Gas Distribution System Components

SEMI F60 — Test Method for ESCA Evaluation of Surface Composition of Wetted Surfaces of Passivated 316L Stainless Steel Components

SEMI F70 — Test Method for Determination of Particle Contribution of Gas Delivery System

SEMI F72 — Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel Components

SEMI F73 — Test Method for Scanning Electron Microscopy (SEM) Evaluation of Wetted Surface Condition of Stainless Steel Components

SEMI F77 — Test Method for Electrochemical Critical Pitting Temperature Testing of Alloy Surfaces Used in Corrosive Gas Systems

Revision History

SEMI F19-0304 (complete rewrite)

SEMI F19-95 (first published)

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