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SEMI E95-1101 - Specification for Human Interface for Semiconductor Manufacturing Equipment

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
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Status
SUPERSEDED - REPLACED BY A NEWER VERSION.


Abstract

This specification was technically approved by the global Information & Control Committee and is the direct responsibility of the North American Information and Control Committee. Current edition approved by the North American Regional Standards Committee on August 27, 2001. Initially available at www.semi.org September 2001; to be published November 2001. Originally published February 2000.

 

This standard addresses the area of processing content with the direct intention of developing common software standards, so that problems involving operator training, operation specifications, and efficient development can be resolved more easily.


Referenced SEMI Standards

None.


Revision History

SEMI E95-1101 (technical revision)

SEMI E95-0200 (first published)


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