This standard was technically approved by the global Metrics Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 24, 2006. It was available at www.semi.org in October 2006. Originally published February 1999; previously published March 2005.

The purpose of this specification is toThe document provides metrics for measuring equipment productivity. This specification defines metrics and calculations for measurement of equipment productivity. In the context of this documentspecification, it is important to note that "equipment productivity" is impacted greatly by factors far beyond the equipment itself, including operator actions, recipe settings, facility issuesies, material availability, scheduling requirements, etc. Effective application of this specification requires that equipment performance is tracked using the metrics for eEquipment Reliability, Availability, and Maintainability (RAM) established in SEMI E10.

SEMI E10 — Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM)
SEMI E38 — Cluster Tool Module Communications (CTMC)
SEMI E58 — Automated Reliability, Availability, and Maintainability Standard (ARAMS):  Concepts, Behavior, and Services
SEMI E116 — Provisional Specification for Equipment Performance Tracking

SEMI E79-1106 (technical revision)

SEMI E79-0304 (technical revision)

SEMI E79-0200 (technical revision)

SEMI E79-0299 (first published)