was technically approved by the global Information & Control Committee and
is the direct responsibility of the North American Information & Control
Committee. Current edition approved by the North American Regional Standards
Committee on October 19, 2000. Initially available at www.semi.org January 2001;
to be published March 2001. Originally published June 1997.
designation of SEMI E58 was updated during the 0703 publishing cycle to reflect
the reapproval of SEMI E58.1.
provides standards for implementing and collecting SEMI E10 state changes at the
equipment level per SEMI E10. SEMI E10 defines various terms and equipment
states but was not written specifically for application by automated equipment.
This document is intended to provide a consistent interpretation of these
equipment states through formal state model methodology. ARAMS defines concepts,
behavior, and message services to support the integration of automated systems
within a semiconductor factory. To implement the integration of SEMI E10 states
on automated equipment, integration of definitions and requirements must be
detailed and precise to ensure interpretations are consistent across equipment
suppliers. This provides an opportunity to automatically retain information at
the equipment itself. Both equipment supplier and equipment user benefit from
the automation of SEMI E10 data collection at the equipment through application
of a consistent state model. SEMI E10 defines specific states but does not
address transitions between states. The ARAMS standard specifies the triggers
for state transitions made by automated equipment. Extensions to SEMI E10
described in this document apply to decisions made by automated equipment only.
(Reapproved 0703) - SECS-II Protocol for Automated Reliability,
Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and
SEMI E10 — Standard for Definition and Measurement of Equipment Reliability,
Availability, and Maintainability (RAM)SEMI E30 — Generic Model for
Communications and Control of SEMI Equipment (GEM)SEMI E38 — Cluster Tool
Module Communications (CTMC)SEMI E39 — Object Services Standard: Concepts,
Behavior, and ServicesSEMI E41 — Exception Management (EM) StandardSEMI
E42 — Recipe Management Standard: Concepts, Behavior, and Message
ServicesSEMI E53 — Event