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SEMI E48-1101 (Reapproved 1107) - Specification for SMIF Indexer Volume Requirement

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
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Status
INACTIVE - Not currently supported by the technical committee.


Abstract

This standard was technically approved by the global Physical Interfaces & Carriers Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on September 5, 2007. It was available at www.semi.org in October 2007. Originally published in 1995; previously published November 2001.

 

The purpose of this specification is to provide the volume required within a tool that enables integration of SMIF into tools with single or multiple ports.


Referenced SEMI Standards

SEMI E15 — Specification for Tool Load Port

SEMI E19 — Standard Mechanical Interface (SMIF)


Revision History

SEMI E48-1101 (Reapproved 1107)

SEMI E48-1101 (technical revision)

SEMI E48-0701 (technical revision)

SEMI E48-95 (Reapproved 0600)

SEMI E48-95 (first published)


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