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SEMI E150-1107 - Guide for Equipment Training Best Practices

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
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SUPERSEDED - Replaced by a newer version.


This standard was technically approved by the global Metrics Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on September 5, 2007. It was available at www.semi.org in October 2007.


The purpose of this standard is to provide recommendations for developing and delivering equipment training so that it is performance-based. Performance-based equipment training (PBET) improves the likelihood that the workforce of semiconductor equipment owners can successfully install, use, maintain, and repair their equipment. In so doing, PBET improves the equipment owner’s ability to attain reliability, availability, and maintainability (RAM) goals. As such, PBET helps to increase productivity and reduce costs.

Referenced SEMI Standards

SEMI E10 — Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM)

SEMI E149 — Guide for Equipment Supplier-Provided Documentation for the Acquisition and Use of Manufacturing Equipment

SEMI S19 — Safety Guidelines for Training of Semiconductor Manufacturing Equipment Installation, Maintenance and Service Personnel

Revision History
SEMI E150-1107 (first published)

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