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SEMI E168-0114 - Specification for Product Time Measurement

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
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This Standard was technically approved by the Metrics Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23, 2013. Available at www.semiviews.org and www.semi.org in January 2014.


The purpose of this Document is to provide the semiconductor industry with support in the identification and elimination of product time waste in the product life cycle within the factory. The Document describes an approach to product time measurement which, if uniformly applied, will support the creation of results that can be compared from one production line to another.


This Document defines a method for organizing and preprocessing factory data to support the detection and reduction of product time waste for a product unit during its time in the factory.


The method takes a user-specified time period, breaks it down into contiguous time segments and categorizes each time segment as a type of active or wait time.


Factory events and context data are used to delineate the time segments. The output of product time measurement is an analysis-ready data set. Procedures for analysis of the data to identify specific product time waste are excluded from this Document.


This Document specifies a common approach for gathering and combining data to support the reduction of product cycle time through the identification and elimination of product time waste in the factory life cycle of a product unit. It is defined in a general way so that it can be applied to different domains, including different types of factories (e.g., wafer fabs or flat panel factories) and different aspects within a factory (e.g., production equipment or automated material handling systems).


Product time measurement may be applied at the individual substrate-level or the lot-level.


Subordinate Document:

SEMI E168.1-0114 - Specification for Product Time Measurement in GEM 300 Production Equipment


Referenced SEMI Standards

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E40 — Standard for Processing Management

SEMI E87 — Specification for Carrier Management (CMS)

SEMI E90 — Specification for Substrate Tracking

SEMI E94 — Specification for Control Job Management

SEMI E148 — Specification for Time Synchronization and Definition of the TS-Clock Object

SEMI E151 — Guide for Understanding Data Quality

SEMI E157 — Specification for Module Process Tracking

SEMI E160 — Specification for Communication of Data Quality

SEMI E164 — Specification for EDA Common Metadata

Revision History

SEMI E168-0114 (first published)


SEMI E168.1-0114 (first published)

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