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SEMI C82-0713 - Test Method for Particle Removal Performance of Liquid Filter Rated 20 to 50 nm With Liquid-Borne Particle Counter

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)
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CURRENT - Supported by the technical committee.


This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 4, 2013. Available at www.semiviews.org and www.semi.org in July 2013.


This Document is to provide a standard of monodispersed gold nanoparticle (GNP) challenge test for liquid filter rated 20 to 50 nm using optical liquid-borne particle counter.


This Document covers a monodispersed GNP challenge test method for 20 to 50 nm rated liquid filter.


This Document defines a test condition for monodispersed GNP challenge test.


The following areas are to be addressed in this Document:

  • The test condition such as fluid, flow rate, pressure, GNP concentration, ligand concentration, membrane treatment etc.
  • The type of filter evaluated.
  • The type of gold nanoparticle (GNP) (reference material).
  • The method of membrane treatment prior to the test for decreasing the adsorbing effect.
  • The description of the test result.

Referenced SEMI Standards

SEMI F63 — Guide for Ultrapure Water Used in Semiconductor Processing

SEMI F110 — Test Method for Mono-dispersed Polystyrene Latex (PSL) Challenge of Liquid Filters

Revision History

SEMI C82-0713 (first published)

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