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SEMI E83-0413 - Specification for PGV Mechanical Docking Flange

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
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This Standard was technically approved by the global Physical Interfaces & Carriers Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 20, 2012. Available at www.semiviews.org and www.semi.org in April 2013; originally published June 1999; previously published November 2006.


This Specification is intended to promote consistent interface features between person guided vehicles (PGV) and equipment with a load port.


This Specification defines a mechanical standard for the stationary (equipment) side of the docking flange used by PGVs. This flange is to be mounted to the floor within the volume defined by the equipment loadport standards. These standards include, but are not limited to: SEMI E64 volume at SEMI E15.1 and SEMI G82 load ports (for 300 mm) and SEMI E154 (for 450 mm wafer carriers).

Referenced SEMI Standards

SEMI E15 — Specification for Tool Load Port

SEMI E15.1 — Specification for 300 mm Tool Load Port

SEMI E64 — Specification for 300 mm Cart to SEMI E15.1 Docking Interface Port

SEMI E154 — Mechanical Interface Specification for 450 mm Load Port

SEMI G82 — Provisional Specification for 300 mm Load Port for Frame Cassettes in Backend Process

Revision History

SEMI E83-0413 (technical revision)

SEMI E83-1106 (technical revision)

SEMI E83-1000 (technical revision)

SEMI E83-0699 (first published)

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