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SEMI E33-1012 - Guide for Semiconductor Manufacturing Equipment Electromagnetic Compatibility (EMC)

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
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This Standard was technically approved by the global Metrics Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 30, 2012. Available at www.semiviews.org and www.semi.org in October 2012; originally published in 1994.


NOTICE: This Document was completely rewritten in 2012.


The purpose of this Guide is make recommendations to help assure that manufacturing equipment used for manufacturing semiconductor devices will operate reliably without failures caused by electromagnetic interference (EMI). This desired characteristic is generally known as electromagnetic compatibility (EMC).


This Guide applies to equipment constructed for the purpose of manufacturing semiconductor devices. Equipment types include communications equipment, control equipment, processing equipment, metrology equipment, inspection equipment, automation equipment, and information technology equipment. Some terms are specialized to semiconductor facilities and equipment.


The primary focus of this Guide is semiconductor manufacturing equipment used for manufacturing semiconductor devices, but this Guide may also be applied to the equipment used for manufacturing related products (e.g., flat panel displays [FPDs], microelectromechanical systems [MEMS]).

Referenced SEMI Standards

SEMI E78 — Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment

SEMI F47 — Specification for Semiconductor Processing Equipment Voltage Sag Immunity

Revision History

SEMI E33-1012 (technical revision)

SEMI E33-94 (first published)

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