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SEMI Downloads
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Volumes(s): Equipment Automation Hardware
Language: English
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SEMI E162-0912 - Mechanical Interface Specification for 450 mm Front-Opening Shipping Box Load Port |
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SEMI Standards Copyright Policy/License Agreements |
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Status |
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CURRENT - Supported by the technical committee. |
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Abstract |
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This Standard was technically approved by the global
Physical Interfaces & Carriers Technical Committee. This edition was
approved for publication by the global Audits and Reviews Subcommittee on June
18, 2012. Available at www.semiviews.org and www.semi.org in September 2012;
originally published November 2011.
The purpose of this Document is to define the basic
interface dimensions of a load port on the semiconductor manufacturing
equipment, where a 450 front-opening shipping box (FOSB) can be loaded and
unloaded. The intention of this Document is to define a set of requirement and
features to enable interoperability of load ports and carriers without limiting
innovative solutions.
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Referenced SEMI Standards |
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SEMI E154 ―
Mechanical Interface Specification for 450 mm Load Port
SEMI M80 — Mechanical Specification for Front-Opening
Shipping Box Used to Transport and Ship 450 mm
Wafers
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Revision History: |
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SEMI E162-0912
(technical revision)
SEMI E162-1111 (first
published)
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