This Standard was technically approved by the global
Physical Interfaces & Carriers Technical Committee. This edition was
approved for publication by the global Audits and Reviews Subcommittee on August
30, 2012. Available at www.semiviews.org and www.semi.org in September 2012;
originally published June 2011; previously published March 2012.
The purpose of this Document is to establish basic
physical dimensions for the carriers intended to be used to transport and ship
450 mm wafers, as specified by SEMI M74.
This Document is intended to define the reference
planes for the dimensions of the carriers and the load port features that will
interact with the carriers.
This Document is intended to define a set of
requirements to ensure interoperability of load ports and carriers without
limiting innovative solutions.
SEMI E1.9 —
Mechanical Specification for Cassettes Used to Transport and Store 300 mm
SEMI E30.1 —
Inspection and Review Specific Equipment Model (ISEM)
SEMI E144 —
Provisional Specification for RF Air Interface Between RFID Tags in Carriers and
RFID Reader in Semiconductor Production and Material Handling
SEMI E154 —
Mechanical Interface Specification for 450 mm Load Port
SEMI M74 —
Specification for 450 mm Diameter Mechanical Handling Polished
SEMI E159-0312 (technical
SEMI E159-0611 (first