This Standard was technically approved by the global
Physical Interfaces & Carriers Technical Committee. This edition was
approved for publication by the global Audits and Reviews Subcommittee on August
30, 2012. Available at www.semiviews.org and www.semi.org in September 2012;
originally published July 2010; previously published February 2012.
The purpose of this Document is to establish basic
physical dimensions for the carriers intended to be used to transport and store
450 mm wafers, as specified by SEMI M74, within semiconductor device
This Document is intended to define the reference
planes for the dimensions of the carriers and the load port features that will
interact with the carriers.
This Document is intended to define a set of
requirements to ensure interoperability of load ports and carriers without
limiting innovative solutions.
SEMI E144 —
Specification for RF Air Interface Between RFID Tags in Carriers and RFID Reader
in Semiconductor Production and Material Handling Equipment
SEMI M74 —
Specification for 450 mm Diameter Mechanical Handling Polished
SEMI E158-0212 (technical
SEMI E158-1110 (technical revision)