Welcome to SEMI

SEMI Downloads
 
   

$250.00
Volumes(s): Materials

Language: English
SEMI M80-0812 - Mechanical Specification for Front-Opening Shipping Box Used to Transport and Ship 450 mm Wafers
SEMI Standards Copyright Policy/License Agreements
Status
CURRENT - Supported by the technical committee.

Abstract

This Standard was technically approved by the global Silicon Wafer Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 18, 2012. Available at www.semiviews.org and www.semi.org in August 2012; originally published November 2011.

　

This Standard specifies the front-opening shipping box (FOSB) used to ship 450　mm wafers from wafer suppliers to their customers (typically IC manufacturers), while maintaining wafer quality.

Referenced SEMI Standards
 

SEMI E144 — Specification for RF Air Interface Between RFID Tags in Carriers and RFID Reader in Semiconductor Production and Material Handling Equipment

SEMI E154 — Mechanical Interface Specification for 450　mm Load Port

SEMI E158 — Mechanical Specification for FAB Wafer Carrier Used to Transport and Store 450　mm Wafers (450　FOUP) and Kinematic Coupling

SEMI M74 — Specification for 450　mm Diameter Mechanical Handling Polished Wafers

Revision History:
 

SEMI M80-0812 (technical revision)

SEMI M80-1111 (first published)