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SEMI S2-0712 - Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

Volume(s): Safety Guidelines;Facilities
Language: English
Type: Single Standards Download (.pdf)
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This Safety Guideline was technically approved by the global Environmental Health & Safety Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www.semiviews.org and www.semi.org in July 2012; originally published in 1991; previously published February 2012.


This Safety Guideline is intended as a set of performance-based environmental, health, and safety (EHS) considerations for semiconductor manufacturing equipment.

Referenced SEMI Standards

SEMI E6 — Guide for Semiconductor Equipment Installation Documentation

SEMI F5 — Guide for Gaseous Effluent Handling

SEMI F14 — Guide for the Design of Gas Source Equipment Enclosures

SEMI F15 — Test Method (SF6 Tracer Gas) for Enclosures Has Been Moved to SEMI S6

SEMI S1 — Safety Guideline for Equipment Safety Labels

SEMI S3 — Safety Guideline for Process Liquid Heating System

SEMI S6 — EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment

SEMI S7 — Safety Guidelines for Environmental, Safety, and Health (ESH) Evaluation of Semiconductor Manufacturing Equipment

SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment

SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process

SEMI S12 — Guidelines for Equipment Decontamination

SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Semiconductor Manufacturing Equipment

SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment

SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment


Revision History

SEMI S2-0712 (technical revision)

SEMI S2-0310e (delayed revision)

SEMI S2-0310d (delayed revision)

SEMI S2-0310c (delayed revision)

SEMI S2-0310b (delayed revision)
SEMI S2-0310a (delayed revision)
SEMI S2-0310 (technical revision)
SEMI S2-0709 (technical revision)
SEMI S2-0706e (delayed revision)
SEMI S2-0706d (delayed revision)
SEMI S2-0706c (delayed revision)
SEMI S2-0706b (delayed revision)
SEMI S2-0706a (delayed revision)
SEMI S2-0706E (editorial revision)
SEMI S2-0706 (technical revision)
SEMI S2-0703aE (editorial revision)
SEMI S2-0703a (delayed revision)
SEMI S2-0703 (technical revision)
SEMI S2-0303 (technical revision)
SEMI S2-1102 (technical revision)
SEMI S2-0302 (technical revision)
SEMI S2-0200E (editorial revision)
SEMI S2-0200 (complete rewrite)
SEMI S2-93A (technical revision)
SEMI S2-93 (technical revision)
SEMI S2-91 (first published)

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