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SEMI M24-0612 - Specification for Polished Monocrystalline Silicon Premium Wafers
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Status
CURRENT - Supported by the technical committee.

Abstract

This Standard was technically approved by the global Silicon Wafer Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on February 21, 2012. Available at www.semiviews.org and www.semi.org in June 2012; originally published in 1994; previously published March 2007.

　

This Document specifies requirements for virgin silicon premium wafers with nominal diameter from 150 to 300　mm used for particle counting, metal contamination monitoring, and measuring pattern resolution in the photolithography process in semiconductor manufacturing. The premium wafer has tighter specification values in some specific items for the specific usage, and looser or equal specification values in other items than a prime wafer has.

Referenced SEMI Standards
 

SEMI M1 — Specifications for Polished Single Crystal Silicon Wafers

SEMI M45 — Specification for 300 mm Wafer Shipping System

SEMI M59 — Terminology for Silicon Technology

SEMI T3 — Specification for Wafer Box Labels

SEMI T7 — Specification for Back Surface Marking of Double-Side Polished Wafers with a Two-Dimensional Matrix Code Symbol

Revision History:
 

SEMI M24-0612 (technical revision)

SEMI M24-0307 (technical revision)

SEMI M24-1105 (technical revision)

SEMI M24-1103 (technical revision)

SEMI M24-1101 (technical revision)

SEMI M24-0301E (editorial revision)

SEMI M24-0301 (technical revision)

SEMI M24-0999E (editorial revision)

SEMI M24-0999 (technical revision)

SEMI M24-0299E (editorial revision)

SEMI M24-0299 (technical revision)

SEMI M24-1296 (technical revision)

SEMI M24-94 (first published)