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SEMI E154-0612 - Mechanical Interface Specification for 450 mm Load Port

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
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This Standard was technically approved by the global Physical Interfaces & Carriers Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on February 21, 2012. Available at www.semiviews.org and www.semi.org in June 2012; originally published February 2010; previously published November 2010.


The purpose of this Document is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment (SME), where a 450 FOUP can be loaded and unloaded. The intention of this Document is to define a set of requirement and features to enable interoperability of load ports and carriers without limiting innovative solutions.

Referenced SEMI Standards

SEMI E15.1 — Specification for 300 mm Tool Load Port

SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)

SEMI E63 — Mechanical Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface

SEMI E158 — Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling

Revision History

SEMI E154-0612 (technical revision)

SEMI E154-1110 (technical revision)

SEMI E154-0310 (first published)

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