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SEMI Downloads
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Volumes(s): Equipment Automation Hardware
Language: English
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SEMI E154-0612 - Mechanical Interface Specification for 450 mm Load Port |
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SEMI Standards Copyright Policy/License Agreements |
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Status |
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CURRENT - Supported by the technical committee. |
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Abstract |
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This Standard was technically approved by the global
Physical Interfaces & Carriers Technical Committee. This edition was
approved for publication by the global Audits and Reviews Subcommittee on
February 21, 2012. Available at www.semiviews.org and www.semi.org in June 2012;
originally published February 2010; previously published November
2010.
The purpose of this Document is to define the basic
interface dimensions of a load port on the semiconductor manufacturing equipment
(SME), where a 450 FOUP can be loaded and unloaded. The intention of this
Document is to define a set of requirement and features to enable
interoperability of load ports and carriers without limiting innovative
solutions. |
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Referenced SEMI Standards |
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SEMI E15.1 —
Specification for 300 mm Tool Load Port
SEMI E62 —
Specification for 300 mm Front-Opening Interface Mechanical Standard
(FIMS)
SEMI E63 —
Mechanical Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M)
Interface
SEMI E158 —
Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450
mm Wafers (450 FOUP) and Kinematic Coupling |
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Revision History: |
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SEMI E154-0612
(technical revision)
SEMI E154-1110 (technical revision)
SEMI E154-0310
(first published) |
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