This standard was technically approved by the global Metrics Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on September 5, 2007. It was available at www.semi.org in October 2007. Originally published July 2003; previously published November 2003.

This guide describes metrics that show how well a factory is operating compared to how well it could be operating (for the given product mix). These metrics can be used for tracking factory performance (in value-added production) in a way that rewards good operational decisions and that is not easy to adversely manipulate. The metrics can be used in a process of ongoing improvement that can be visible to all levels of a semiconductor manufacturing organization. The metrics in this guide are intended for evaluating the relative efficiency of factory production after the factory is in production, not for capacity analysis while the factory is being designed or redesigned. However, some of these metrics can be used in factory simulations for choosing equipment sets and scheduling policies.

SEMI E124-1107 (technical revision)

SEMI E124-1103 (technical revision)

SEMI E124-0703 (first published)