Welcome to SEMI

SEMI International Standards

SEMI E124-1107 - Guide for Definition and Calculation of Overall Factory Efficiency (OFE) and Other Associated Factory-Level Productivity Metrics

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
SEMI Standards Copyright Policy/License Agreements
Bookmark and Share
Non Member Pricing
USD $150.00
Member Pricing
USD $113.00



This standard was technically approved by the global Metrics Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on September 5, 2007. It was available at www.semi.org in October 2007. Originally published July 2003; previously published November 2003.


This guide describes metrics that show how well a factory is operating compared to how well it could be operating (for the given product mix). These metrics can be used for tracking factory performance (in value-added production) in a way that rewards good operational decisions and that is not easy to adversely manipulate. The metrics can be used in a process of ongoing improvement that can be visible to all levels of a semiconductor manufacturing organization. The metrics in this guide are intended for evaluating the relative efficiency of factory production after the factory is in production, not for capacity analysis while the factory is being designed or redesigned. However, some of these metrics can be used in factory simulations for choosing equipment sets and scheduling policies.

Referenced SEMI Standards

SEMI E10 — Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM)

SEMI E35 — Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment

SEMI E58 — Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services

SEMI E79 — Specification for Definition and Measurement of Equipment Productivity

SEMI E116 — Specification for Equipment Performance Tracking


Revision History

SEMI E124-1107 (technical revision)

SEMI E124-1103 (technical revision)

SEMI E124-0703 (first published)

Related Products
Need Access to all SEMI Standards?
Check out SEMIViews our web-based Standards libray.