Welcome to SEMI

SEMI International Standards

SEMI E90-0312 - Specification for Substrate Tracking

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
SEMI Standards Copyright Policy/License Agreements
Bookmark and Share
Non Member Pricing
USD $150.00
Member Pricing
USD $113.00

CURRENT - Supported by the technical committee.


This Standard was technically approved by the global Information & Control Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www.semiviews.org and www.semi.org in March 2012; originally published September 1999; previously published November 2011.


The purpose of this Standard is to provide the standard services of equipment to track substrates (manufactured product) in manufacturing equipment. This Standard defines the concepts and behaviors for the information management of substrates, as well as the messages/services.


Subordinate Document:

SEMI E90.1-0312 - Specification for SECS-II Protocol Substrate Tracking

Referenced SEMI Standards

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

SEMI E39.1 — SECS-II Protocol for Object Services Standard (OSS)

SEMI E53 — Event Reporting

SEMI E87 — Specification for Carrier Management (CMS)


Revision History

SEMI E90-0312 (technical revision)

SEMI E90-1111 (designation update)

SEMI E90-0707 (technical revision)

SEMI E90-0706 (technical revision)

SEMI E90-0306 (technical revision)

SEMI E90-1105 (technical revision)

SEMI E90-0705 (technical revision)

SEMI E90-1104E2 (editorial revision)

SEMI E90-1104E (editorial revision)

SEMI E90-1104 (technical revision)

SEMI E90-0304 (technical revision)

SEMI E90-0703 (technical revision)

SEMI E90-0303 (technical revision)

SEMI E90-1102 (technical revision)

SEMI E90-0702 (technical revision)

SEMI E90-0302 (technical revision)

SEMI E90-1101 (technical revision)

SEMI E90-0701 (technical revision)

SEMI E90-0301 (technical revision)

SEMI E90-1000 (technical revision)

SEMI E90-0600 (technical revision)

SEMI E90-0200 (technical revision)

SEMI E90-0999 (first published)


SEMI E90.1-0312 (technical revision)

SEMI E90.1-1111 (technical revision)

SEMI E90.1-0706 (technical revision)

SEMI E90.1-0705 (technical revision)

SEMI E90.1-1104 (technical revision)

SEMI E90.1-0703 (technical revision)

SEMI E90.1-0303 (technical revision)

SEMI E90.1-1102 (technical revision)

SEMI E90.1-0702 (technical revision)

SEMI E90.1-0701 (technical revision)

SEMI E90.1-0301 (first published)

Related Products
Need Access to all SEMI Standards?
Check out SEMIViews our web-based Standards libray.