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SEMI E87-0312 - Specification for Carrier Management (CMS)

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
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This Standard was technically approved by the global Information & Control Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www.semiviews.org and www.semi.org in March 2012; originally published in 1999; previously published July 2009.


This Document provides a standardized behavior for host view communication with production equipment during the coordination, execution, and completion of automated and manual carrier transfers to and from the equipment and, if it exists, its internal buffer space.


Subordinate Document:

SEMI E87.1-0707 - Provisional Specification for SECS-II Protocol for Carrier Management (CMS)

Referenced SEMI Standards

SEMI E15 — Specification for Tool Load Port

SEMI E15.1 — Specification for 300 mm Tool Load Port

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)

SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface

SEMI E90 — Specification for Substrate Tracking

SEMI E99 — The Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behavior, and Services

Revision History

SEMI E87-0312 (technical revision)

SEMI E87-0709 (technical revision)

SEMI E87-0707 (technical revision)

SEMI E87-0706E2 (editorial revision)

SEMI E87-0706E (editorial revision)

SEMI E87-0706 (technical revision)

SEMI E87-1105 (technical revision)

SEMI E87-0705 (technical revision)

SEMI E87-0304 (technical revision)

SEMI E87-0703 (technical revision)

SEMI E87-0303 (technical revision)

SEMI E87-0702 (technical revision)

SEMI E87-0302 (technical revision)

SEMI E87-1101 (technical revision)

SEMI E87-0701 (technical revision)

SEMI E87-0301 (technical revision)

SEMI E87-1000 (technical revision)

SEMI E87-0600 (technical revision)

SEMI E87-0200 (technical revision)

SEMI E87-0999 (first published)


SEMI E87.1-0707 (technical revision)

SEMI E87.1-1105 (technical revision)

SEMI E87.1-0702 (technical revision)

SEMI E87.1-0302 (technical revision)

SEMI E87.1-1101 (technical revision)

SEMI E87.1-0701 (technical revision)

SEMI E87.1-0301 (technical revision)

SEMI E87.1-1000 (technical revision)

SEMI E87.1-0200 (first published)

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