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SEMI E40-0312 - Standard for Processing Management

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
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This Standard was technically approved by the global Information & Control Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www.semiviews.org and www.semi.org in March 2012; originally published in 1995; previously published November 2011.


Automated management and command of material processing in equipment is a crucial aspect enabling factory automation. This Standard addresses the communications needs within the semiconductor manufacturing environment with respect to the processing of material in equipment.


This Standard specifies the application of the appropriate processing to specified material received at the processing agent. It describes the concepts of material processing, the behavior of the equipment in relation to processing, and the messaging services which are needed to accomplish the task.


The communications services defined here enable standards-based interoperability of independent systems. They allow application software to be developed that can assume the existence of these services and allow software products to be developed which offer them.


Implementation of automated processing management will help eliminate misprocessing of material. The adoption of the standards described will greatly reduce the effort required to integrate compliant equipment components and reduce time to set up for processing. Compliance requires a minimal but specific set of standard services.


Subordinate Document:

SEMI E40.1-0312 — SECS-II Support for Processing Management Standard

Referenced SEMI Standards

SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

SEMI E39.1 — SECS-II Protocol for Object Services Standard (OSS)

SEMI E40 — Standard for Processing Management

SEMI E53 — Event Reporting


Revision History

SEMI E40-0312 (technical revision)

SEMI E40-1111 (designation update)

SEMI E40-0709 (technical revision)

SEMI E40-0309 (technical revision)

SEMI E40-1107 (technical revision)

SEMI E40-0307 (technical revision)

SEMI E40-1106 (technical revision)

SEMI E40-0705E (editorial revision)

SEMI E40-0705 (technical revision)

SEMI E40-0304 (technical revision)

SEMI E40-0703 (technical revision)

SEMI E40-1102 (technical revision)

SEMI E40-0702 (technical revision)

SEMI E40-1101 (technical revision)

SEMI E40-0701 (technical revision)

SEMI E40-0301 (technical revision)

SEMI E40-1000 (technical revision)

SEMI E40-0200 (technical revision)

SEMI E40-0999 (technical revision)

SEMI E40-95 (first published)


SEMI E40.1-0312 (technical revision)

SEMI E40.1-1106 (Reapproved 1111)

SEMI E40.1-1106 (technical revision)

SEMI E40.1-0705 (technical revision)

SEMI E40.1-0304 (technical revision)

SEMI E40.1-1101 (technical revision)

SEMI E40.1-0701 (technical revision)

SEMI E40.1-1000 (technical revision)

SEMI E40.1-0996 (first published)

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