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SEMI F57-0312 - Specification for Polymer Materials and Components Used in Ultrapure Water and Liquid Chemical Distribution Systems

Volume(s): Facilities
Language: English
Type: Single Standards Download (.pdf)
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This Standard was technically approved by the global Liquid Chemicals Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www.semiviews.org and www.semi.org in March 2012; originally published October 2000; previously published March 2001.


NOTICE: This Document was completely rewritten in 2011.


This Document specifies minimum performance requirements for ultra high purity (UHP) polymer materials and components suitable for conveying ultrapure water (UPW) in UPW distribution systems. Further information regarding UPW systems can be found in SEMI F61.


It also provides recommendations for the use of polymer materials and components used in UHP liquid chemical distribution systems (LCDS). Such distribution systems covered in this Document include bulk supply, facility distribution, and process equipment applications.


Although the requirements of this Document focus on testing materials and components with UPW at elevated temperatures, there could be other applicable chemicals, such as caustics and oxidizers, which users of this Document might like to consider. However, defining the vast number of testing parameters for each possible liquid chemistry stream is beyond the scope of this Document. Nevertheless, this Document intends neither to exclude nor to limit the possibility that suppliers and end-users might test with chemicals other than UPW or with other temperature conditions and, at the same time, set their own internal limits separate from the requirements within this Document.

Referenced SEMI Standards

SEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final Assemblies

SEMI F40 — Practice For Preparing Liquid Chemical Distribution Components for Chemical Testing

SEMI F61 — Guide for Ultrapure Water Systems Used in Semiconductor Processing

SEMI F104 — Particle Test Method Guidelines for Evaluation of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

Revision History

SEMI F57-0312 (technical revision)

SEMI F57-0301 (technical revision)

SEMI F57-1000 (first published)

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