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SEMI S18-0312 - Environmental, Health and Safety Guideline for Flammable Silicon Compounds

Volume(s): Safety Guidelines
Language: English
Type: Single Standards Download (.pdf)
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CURRENT - Supported by the technical committee.


This Safety Guideline was technically approved by the global Environmental Health & Safety Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www.semiviews.org and www.semi.org in March 2012; originally published November 2002.


NOTICE: This Document was completely rewritten in 2011.


This Safety Guideline is intended as a minimum set of safety and health criteria for storage, handling, and use of flammable silicon compounds from supply to abatement.


This Safety Guideline is also intended as a minimum set of safety and health design criteria for semiconductor, FPD, PV manufacturing equipment and other equipment that uses flammable silicon compounds for processing.

Referenced SEMI Standards

SEMI F1 — Specification for Leak Integrity of High-Purity Gas Piping Systems and Components

SEMI F5 — Guide for Gaseous Effluent Handling

SEMI F6 — Guide for Secondary Containment of Hazardous Gas Piping Systems

SEMI S1 — Safety Guideline for Equipment Safety Labels

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

SEMI S4 — Safety Guideline for the Separation of Chemical Cylinders Contained in Dispensing Cabinets

SEMI S5 — Safety Guideline for Sizing and Identifying Flow Limiting Devices for Gas Cylinder Valves

SEMI S6 — EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment

SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process

SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Semiconductor Manufacturing Equipment

SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment

Revision History

SEMI S18-0312 (technical revision)

SEMI S18-1102 (first published)

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