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SEMI Downloads
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Volumes(s): Equipment Automation Hardware
Language: English
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SEMI E35-0312 - Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment |
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SEMI Standards Copyright Policy/License Agreements |
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Status |
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CURRENT - Supported by the technical committee. |
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Abstract |
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This Standard was technically approved by the global
Metrics Technical Committee. This edition was approved for publication by the
global Audits and Reviews Subcommittee on December 24, 2011. Available at
www.semiviews.org and www.semi.org in March 2012; originally published in 1995;
previously published March 2007.
The purpose of this Guide is to provide standard
metrics for evaluating unit production cost effectiveness of manufacturing
equipment in the semiconductor and related industries.
This Guide establishes a procedure to facilitate an
understanding of equipment-related costs, including costs related to
environmental, health and safety (EHS) factors, by providing definitions,
classifications, algorithms, methods, and default values necessary to build a
comprehensive, constrained, or monitor cost of ownership (COO)
calculator. |
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Referenced SEMI Standards |
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SEMI E10 —
Specification for Definition and Measurement of Equipment Reliability,
Availability, and Maintainability (RAM) and Utilization
SEMI E81 —
Provisional Specification for CIM Framework Domain Architecture
SEMI E89 —
Guide for Measurement System Analysis (MSA)
SEMI E149 —
Guide for Equipment Supplier-Provided Documentation for the Acquisition and Use
of Manufacturing Equipment
SEMI S12 —
Guidelines for Equipment Decontamination
SEMI S16 —
Environmental, Health and Safety Guidelines for Semiconductor Manufacturing
Equipment Disposal
SEMI S23 —
Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor
Manufacturing Equipment |
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Revision History: |
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SEMI E35-0312
(technical revision)
SEMI E35-0307 (technical revision)
SEMI E35-0305
(complete rewrite)
SEMI E35-0304
(designation update)
SEMI E35-0701
(technical revision)
SEMI E35-0200
(technical revision)
SEMI E35-0299
(technical revision)
SEMI E35-95
(first published)
SEMI E35.1-95
(Withdrawn 0304)
SEMI E35.1-95
(first published) |
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