Welcome to SEMI

SEMI International Standards

SEMI E35-0312 - Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
SEMI Standards Copyright Policy/License Agreements
Bookmark and Share
Non Member Pricing
USD $150.00
Member Pricing
USD $113.00



This Standard was technically approved by the Metrics Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www.semiviews.org and www.semi.org in March 2012; originally published in 1995; previously published March 2007.


The purpose of this Guide is to provide standard metrics for evaluating unit production cost effectiveness of manufacturing equipment in the semiconductor and related industries.


This Guide establishes a procedure to facilitate an understanding of equipment-related costs, including costs related to environmental, health and safety (EHS) factors, by providing definitions, classifications, algorithms, methods, and default values necessary to build a comprehensive, constrained, or monitor cost of ownership (COO) calculator.


This Guide is applicable to any type of equipment for processing semiconductor units, which may be integrated circuit (IC) wafers and devices. It may also be applicable to any type of manufacturing equipment for processing of a flat panel display (FPD), photovoltaic (PV), micro electro-mechanical systems (MEMS), high-brightness light emitting diode (HB-LED), hard disk drive (HDD), or other types of production units. Some terms are specialized to IC wafer and device production.


Effective use of the metric to build a COO model requires identification of constraints and data values. Where possible, use direct values for inputs rather than deriving them from secondary models or using example values.


Full calculation of COO often requires data held proprietary and is coupled to the overall factory yield and the related cost of yield loss. It is envisioned that this Guide will be used for internal factory and equipment optimization, investment evaluation, and equipment design and process improvements.

Referenced SEMI Standards

SEMI E10 — Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization

SEMI E81 — Provisional Specification for CIM Framework Domain Architecture

SEMI E89 — Guide for Measurement System Analysis (MSA)

SEMI E149 — Guide for Equipment Supplier-Provided Documentation for the Acquisition and Use of Manufacturing Equipment

SEMI S12 — Guidelines for Equipment Decontamination

SEMI S16 — Environmental, Health and Safety Guidelines for Semiconductor Manufacturing Equipment Disposal

SEMI S23 — Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment

Revision History

SEMI E35-0312 (technical revision)

SEMI E35-0307 (technical revision)

SEMI E35-0305 (complete rewrite)

SEMI E35-0304 (designation update)

SEMI E35-0701 (technical revision)

SEMI E35-0200 (technical revision)

SEMI E35-0299 (technical revision)

SEMI E35-95 (first published)


SEMI E35.1-95 (Withdrawn 0304)

SEMI E35.1-95 (first published)

Related Products
Need Access to all SEMI Standards?
Check out SEMIViews our web-based Standards libray.