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SEMI F109-0212 - Guide for Heater Systems Requirements

Volume(s): Facilities
Language: English
Type: Single Standards Download (.pdf)
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CURRENT - Supported by the technical committee.


This Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www.semiviews.org and www.semi.org in February 2012.


The purpose of this Guide is to define a framework for documenting uniform heater system requirements. The intended use of this Document is to act as a generic form for heater system manufacturers to deliver to requestors of custom heaters.


The intended use of this Document is to provide a uniform set of technical definitions to aid in rapid design, development, test, and manufacturing of custom heater systems. This Document applies to all types of resistive electrical heater system used in the semiconductor, flat panel, solar, and related industry.


The Document herein discusses the aspect of: electrical specifications, thermal load, cabling, environmental considerations, performance, operational requirements, control system specification specifications, information exchange, packaging, and testing.

Referenced SEMI Standards


Revision History

SEMI F109-0212 (first published)

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