was technically approved by the global Photovoltaic – Materials Technical
Committee. This edition was approved for publication by the global Audits and
Reviews Subcommittee on December 24, 2011. Available at www.semiviews.org and
www.semi.org in February 2012.
conducting oxide (TCO) films used in the photovoltaic industry are textured in
order to optimize light absorption and maximize cell efficiency. Frequently,
haze measurements are used to characterize such films. The required texture
usually is not well defined by a single haze result because the relative amounts
of low and high frequency roughness on the surface can both be important.
Therefore the haze is frequently determined for a spectrum of source
wavelengths. Then the haze values can often be correlated with useful properties
of the material.
In the PV
field, haze is taken as the total integrated reflective or transmissive scatter
from the surface of the sample. The basics of this measurement are covered in
SEMI M59 —
Terminology for Silicon Technology
SEMI MF1048 —
Test Method for Measuring Reflective Total Integrated Scatter
SEMI PV15 —
Guide for Defining Conditions for Angle Resolved Light Scatter Measurements to
Monitor the Surface Roughness and Texture of PV