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SEMI S3-1211 - Safety Guideline for Process Liquid Heating Systems

Volume(s): Safety Guidelines
Language: English
Type: Single Standards Download (.pdf)
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SUPERSEDED - Replaced by a newer version.


This Safety Guideline was technically approved by the Environmental Health & Safety Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www.semiviews.org and www.semi.org in December 2011; originally published in 1991; previously published March 2006.


NOTICE: Paragraphs entitled NOTE are not an official part of this Document and are not intended to modify or supersede it.


NOTICE: Conformance to provisions containing the word ‘should’ is necessary to declare conformance to this Document. Conformance to those provisions containing ‘may,’ ‘suggested,’ ‘preferred,’ or ‘recommended,’ or to NOTES or Related Information is not necessary to declare conformance.


The purpose of this Safety Guideline is to provide minimum general safety considerations for the design and documentation of heating systems used for changing or maintaining the temperatures of process liquids used in semiconductor and flat panel display manufacturing.


This Safety Guideline provides several means (see Table 1) of achieving a level of Risk no greater than Low (as defined by SEMI S10 and SEMI S14) for process liquid heating systems (PLHS). The choice of which means is used is not, however, a criterion for determining conformance with this Document.


For several common PLHS configurations, this Safety Guideline provides a prescriptive list of safety features to be incorporated in the PLHS. Design and performance criteria for those safety features are also provided. A PLHS that conforms to both the prescriptive list of safety features and the design and performance criteria for those safety features is presumed to achieve a risk level of no greater than Low (as defined by SEMI S10 and SEMI S14) and, thereby, conforms to this Safety Guideline.


Conformance with this Safety Guideline may also be achieved by designing a PLHS and incorporating safety features that are selected, designed, and perform such that the risk of the equipment is no greater than Low, as assessed using SEMI S10 and SEMI S14 and considering the hazards discussed within this Document.


The scope of this Document is limited to heating systems designed to change or maintain the temperature of process liquids.


Deionized (DI) Water Heaters — Deionized (DI) water heaters are included within the scope of this Document when the heated DI water is used as a "process liquid" as defined in § 5.


Heat Transfer Fluids (HTFs) — Where fluids are used to transfer heat between heating systems and process liquids, they are included within the scope of this Document. For the purpose of this document, HTFs are limited to liquids.


Although the scope of SEMI S3 is PLHS, this guideline may be used to evaluate subsystems to determine if integrating them into a PLHS will cause the PLHS not to conform to this guideline.

Referenced SEMI Standards

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

SEMI S6 — EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment

SEMI S10 — Safety Guidelines for Risk Assessment and Risk Evaluation Process

SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment

SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment

Revision History

SEMI S3-1211 (technical revision)

SEMI S3-0306 (complete rewrite)

SEMI S3-91 (first published)

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