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SEMI S3-1211 - Safety Guideline for Process Liquid Heating Systems

Volume(s): Safety Guidelines
Language: English
Type: Single Standards Download (.pdf)
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CURRENT - Supported by the technical committee.


This Standard was technically approved by the global Environmental Health & Safety Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www.semiviews.org and www.semi.org in December 2011; originally published in 1991; previously published March 2006.

The purpose of this Safety Guideline is to provide minimum general safety considerations for the design and documentation of heating systems used for changing or maintaining the temperatures of process liquids used in semiconductor and flat panel display manufacturing.

This Safety Guideline provides several means of achieving a level of Risk no greater than Low (as defined by SEMI S10 and SEMI S14) for process liquid heating systems (PLHS). The choice of which means is used is not, however, a criterion for determining conformance with this Document.

For several common PLHS configurations, this Safety Guideline provides a prescriptive list of safety features to be incorporated in the PLHS. Design and performance criteria for those safety features are also provided. A PLHS that conforms to both the prescriptive list of safety features and the design and performance criteria for those safety features is presumed to achieve a risk level of no greater than Low (as defined by SEMI S10 and SEMI S14) and, thereby, conforms to this Safety Guideline.

Conformance with this Safety Guideline may also be achieved by designing a PLHS and incorporating safety features that are selected, designed, and perform such that the risk of the equipment is no greater than Low, as assessed using SEMI S10 and SEMI S14 and considering the hazards discussed within this Document.


Referenced SEMI Standards


Revision History

SEMI S3-1211 (technical revision)

SEMI S3-0306 (complete rewrite)

SEMI S3-91 (first published)

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