was technically approved by the global Physical Interfaces & Carriers
Technical Committee. This edition was approved for publication by the global
Audits and Reviews Subcommittee on August 27, 2010. Available at
www.semiviews.org and www.semi.org in November 2011.
The purpose of this Document is to
define the basic interface dimensions of a load port on the semiconductor
manufacturing equipment, where a 450 front-opening shipping box (FOSB) can be
loaded and unloaded. The intention of this document is to define a set of
requirement and features to enable interoperability of load ports and carriers
without limiting innovative solutions.
SEMI E154 ― Mechanical Interface Specification for 450 mm