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SEMI M80-1111 - Mechanical Specification for Front-Opening Shipping Box Used to Transport and Ship 450 mm Wafers

Volume(s): Materials
Language: English
Type: Single Standards Download (.pdf)
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This Standard was technically approved by the global Silicon Wafer Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on February 3, 2011. Available at www.semiviews.org and www.semi.org in November 2011.

This Standard specifies the front-opening shipping box (FOSB) used to ship 450 mm wafers from wafer suppliers to their customers (typically IC manufacturers), while maintaining wafer quality.


Referenced SEMI Standards

SEMI E144 — Provisional Specification for RF Air Interface Between RFID Tags in Carriers and RFID Reader in Semiconductor Production and Material Handling Equipment

SEMI E154 — Mechanical Interface Specification for 450 mm Load Port

SEMI E158 — Mechanical Specification for FAB Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling

SEMI M74 — Specification for 450 mm Diameter Mechanical Handling Polished Wafers


Revision History

SEMI M80-1111 (first published)

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