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SEMI E159-0611 - Mechanical Specification for Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
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Status
SUPERSEDED - Replaced by a newer version.


Abstract

This Standard was technically approved by the global Physical Interfaces & Carriers Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 27, 2010. Available at www.semiviews.org and www.semi.org in June 2011.

The purpose of this document is to establish basic physical dimensions for the carriers intended to be used to transport and ship 450 mm wafers, as specified by SEMI M74.

 

This document is intended to define the reference planes for the dimensions of the carriers and the load port features that will interact with the carriers.</p><p>This document is intended to define a set of requirements to ensure interoperability of load ports and carriers without limiting innovative solutions.

 


Referenced SEMI Standards

SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers

SEMI E30.1 — Inspection and Review Specific Equipment Model (ISEM)

SEMI E144 — Provisional Specification for RF Air Interface Between RFID Tags in Carriers and RFID Reader in Semiconductor Production and Material Handling Equipment

SEMI E154 — Mechanical Interface Specification for 450 mm Load Port

SEMI M74 — Specification for 450 mm Diameter Mechanical Handling Polished Wafers

 


Revision History

SEMI E159-0312 (technical revision)

SEMI E159-0611 (first published)


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