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SEMI E154-1110 - Mechanical Interface Specification for 450 mm Load Port

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
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Status
SUPERSEDED - Replaced by a newer version.


Abstract

This standard was technically approved by the global Physical Interfaces & Carriers Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 27, 2010. Initially available at www.semi.org in February 2010.

 

The purpose of this document is to define the basic interface dimensions of a load port on the semiconductor manufacturing equipment, where a 450 FOUP can be loaded and unloaded. The intention of this document is to define a set of requirement and features to enable interoperability of load ports and carriers without limiting innovative solutions.


Referenced SEMI Standards

SEMI E15.1 — Specification for 300 mm Tool Load Port
SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI E63 — Mechanical Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M) Interface
SEMI E158 — Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 Foup) and Kinematic Coupling


Revision History

SEMI E154-1110 (technical revision)

SEMI E154-0310 (first published)


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