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SEMI M45-1110 - Specification for 300 mm Wafer Shipping System

Volume(s): Materials
Language: English
Type: Single Standards Download (.pdf)
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This Standard was technically approved by the Silicon Wafer Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 27, 2010. Available at www.semiviews.org and www.semi.org in October 2010; originally published March 2001; previously published July 2003.


This Standard stipulates transport related materials and systems to minimize the total cost relating to transport of 300 mm wafers from the wafer supplier to the customer.


This Standard stipulates materials relating to transport of 300 mm wafers using shipping boxes (FOSB) regulated by SEMI M31, and includes wafer shipping boxes, bags, labels, cushions, secondary containers, pallets, and shipping documentation.

Referenced SEMI Standards

SEMI M31 — Mechanical Specifications for Front-Opening Shipping Box Used to Transport and Ship 300 mm Wafers

SEMI T3 — Specification for Wafer Box Labels

Revision History

SEMI M45-1110 (technical revision)

SEMI M45-0703 (technical revision)

SEMI M45-0301 (first published)

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