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SEMI E15.1-0305 (Reapproved 1110) - Specification for 300 mm Tool Load Port

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
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INACTIVE - Not currently supported by the technical committee.


This standard was technically approved by the global Physical Interfaces & Carriers Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 27, 2010. Initially available at www.semi.org in October 2010. Originally published in 1996; previously published March 2005.


This specification defines dimensional requirements for the load ports of 300 mm wafer process and inspection equipment. It is intended to promote a uniform physical interface between equipment and the factory, to facilitate the use of automated wafer carrier transport systems, and/or to meet ergonomic requirements for manually loaded equipment.

Referenced SEMI Standards

SEMI E1.9 — Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers
SEMI E15 — Specification for Tool Load Port
SEMI E47.1 — Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers
SEMI E57 — Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers
SEMI E62 — Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)
SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface

Revision History

SEMI E15.1-0305 (Reapproved 1110)

SEMI E15.1-0305 (technical revision)

SEMI E15.1-1104 (technical revision)

SEMI E15.1-1103 (technical revision)

SEMI E15.1-0303 (technical revision)

SEMI E15.1-0600 (technical revision)

SEMI E15.1-0200A (editorial revision)

SEMI E15.1-0200 (technical revision)

SEMI E15.1-0999 (technical revision)

SEMI E15.1-0699 (technical revision)

SEMI E15.1-0698 (technical revision)

SEMI E15.1-0697 (technical revision)

SEMI E15.1-1296 (technical revision)

SEMI E15.1-0996 (technical revision)

SEMI E15.1-96 (first published)

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