This standard was technically approved by the global Physical Interfaces
& Carriers Committee. This edition was approved for publication by the
global Audits & Reviews Subcommittee on August 27, 2010. Initially available
at www.semi.org in October 2010. Originally published in 1979; previously
published March 2010.
This specification provides the dimensional requirements for plastic and
metal wafer carriers used for the processing and handling of 3 inch, 100 mm, 125
mm and 150 mm diameter wafers. It also includes some related information on, but
not a specification for, 200 mm diameter wafer carriers.
SEMI E1-1110 (technical revision)
SEMI E1-0310 (complete rewrite)
SEMI E1-0697 (Reapproved 1102)E (editorial revision)
SEMI E1-0697 (Reapproved 1102)
SEMI E1-0697 (technical revision)
SEMI E1-78 (first published)