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SEMI E1-1110 - Specification for Open Plastic and Metal Wafer Carriers

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
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Status
CURRENT - Supported by the technical committee.


Abstract

This standard was technically approved by the global Physical Interfaces & Carriers Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 27, 2010. Initially available at www.semi.org in October 2010. Originally published in 1979; previously published March 2010.

 

This specification provides the dimensional requirements for plastic and metal wafer carriers used for the processing and handling of 3 inch, 100 mm, 125 mm and 150 mm diameter wafers. It also includes some related information on, but not a specification for, 200 mm diameter wafer carriers.


Referenced SEMI Standards

None.


Revision History

SEMI E1-1110 (technical revision)

SEMI E1-0310 (complete rewrite)

SEMI E1-0697 (Reapproved 1102)E (editorial revision)

SEMI E1-0697 (Reapproved 1102)

SEMI E1-0697 (technical revision)

SEMI E1-78 (first published)


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