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SEMI Downloads
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Volumes(s): Equipment Automation Hardware
Language: English
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SEMI E1-1110 - Specification for Open Plastic and Metal Wafer Carriers |
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SEMI Standards Copyright Policy/License Agreements |
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Status |
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CURRENT - Supported by the technical committee. |
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Abstract |
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This standard was technically approved by the global Physical Interfaces
& Carriers Committee. This edition was approved for publication by the
global Audits & Reviews Subcommittee on August 27, 2010. Initially available
at www.semi.org in October 2010. Originally published in 1979; previously
published March 2010.
This specification provides the dimensional requirements for plastic and
metal wafer carriers used for the processing and handling of 3 inch, 100 mm, 125
mm and 150 mm diameter wafers. It also includes some related information on, but
not a specification for, 200 mm diameter wafer carriers. |
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Referenced SEMI Standards |
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None.
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Revision History: |
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SEMI E1-1110 (technical revision)
SEMI E1-0310 (complete rewrite)
SEMI E1-0697 (Reapproved 1102)E (editorial revision)
SEMI E1-0697 (Reapproved 1102)
SEMI E1-0697 (technical revision)
SEMI E1-78 (first published) |
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