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SEMI E156-0710 - Mechanical Specification for 450 mm AMHS Stocker to Transport Interface

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
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Status
CURRENT - Supported by the technical committee.


Abstract

This standard was technically approved by the global Physical Interfaces & Carriers Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 30, 2010. Initially available at www.semi.org in June 2010.

 

This specification defines the dimensional requirements for the load ports of 450 FOUP stockers. It is intended to provide the required features and dimensions that define the physical interfaces between different types of transport equipment and stockers and to facilitate the use of different automated transport systems in order to meet the different material handling requirements found throughout the factory. This is done by defining four options of interfaces that both the stocker and transport system must comply with.

 

Options defined are as follows: Option A: Active transport (e.g., active OHS) loads a FOUP horizontally to an internal stocker load port. Option B: Active Transport (e.g., OHT) picks or places a FOUP vertically to/from an external stocker load port. Option C: Passive Transport (e.g., passive OHS or conveyor) carries a FOUP to/from stocker port location. Option D: Passive Transport (e.g., conveyor) carries a FOUP to/from an internal stocker port location.


Referenced SEMI Standards

SEMI E154 — Mechanical Interface Specification for 450 mm Load Port

SEMI E158 — Mechanical Specification for Fab Wafer Carrier Used to Transport and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling


Revision History
SEMI E156-0710 (first published)


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