This standard was technically approved by the global Physical Interfaces
& Carriers Committee. This edition was approved for publication by the
global Audits & Reviews Subcommittee on April 30, 2010. Initially available
at www.semi.org in June 2010.
This specification defines the dimensional requirements for the
load ports of 450 FOUP stockers. It is intended to provide the
required features and dimensions that define the physical interfaces between different types of
transport equipment and stockers and to facilitate the use of different automated
transport systems in order to meet the different material handling requirements found
throughout the factory. This is done by defining four options of interfaces
that both the stocker and transport system must comply with.
Options defined are as follows: Option A: Active transport (e.g., active OHS)
loads a FOUP horizontally to an internal stocker load port. Option B: Active
Transport (e.g., OHT) picks or places a FOUP vertically to/from an external
stocker load port. Option C: Passive Transport (e.g., passive OHS or conveyor)
carries a FOUP to/from stocker port location. Option D: Passive Transport (e.g.,
conveyor) carries a FOUP to/from an internal stocker port location.
SEMI E154 — Mechanical Interface Specification for 450 mm Load Port
SEMI E158 — Mechanical Specification for Fab Wafer Carrier Used to Transport
and Store 450 mm Wafers (450 FOUP) and Kinematic Coupling