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SEMI E30-0307E2 - Generic Model for Communications and Control of Manufacturing Equipment (GEM)

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
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NOTICE: SEMI E30.1 and SEMI E30.5 are no longer published within the SEMI E30 family of standards. They are each published and sold separately on their own pages. SEMI E30.4 was re-designated as SEMI E82 and is published and sold separately on its own page.


This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www.semi.org in February 2007. Originally published in 1992; previously published November 2003. E This standard was editorially modified in May 2010 to correct an error. A change was made to ¶ 8.4.1.


The scope of the GEM standard is limited to defining the behavior of semiconductor equipment as viewed through a communications link. The SEMI E5 (SECS-II) standard provides the definition of messages and related data items exchanged between host and equipment. The GEM standard defines which SECS-II messages should be used, in what situations, and what the resulting activity should be. Figure 1.1 illustrates the relationship of GEM, SECS-II and other communications alternatives. The GEM standard does NOT attempt to define the behavior of the host computer in the communications link. The host computer may initiate any GEM message scenario at any time and the equipment shall respond as described in the GEM standard. When a GEM message scenario is initiated by either the host or equipment, the equipment shall behave in the manner described in the GEM standard when the host uses the appropriate GEM messages. The capabilities described in this standard are specifically designed to be independent of lower-level communications protocols and connection schemes (e.g., SECS-I, SMS, point-to-point, connection-oriented or connectionless). Use of those types of standards is not required or precluded by this standard.

Referenced SEMI Standards

SEMI E4 — SEMI Equipment Communications Standard 1 - Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications Standard 2 - Message Content (SECS-II)
SEMI E13 — Standard for SEMI Equipment Communication Standard Message Service (SMS)
SEMI E23 — Specification for Cassette Transfer Parallel I/O Interface

Revision History

SEMI E30-0307E2 (editorial revision)

SEMI E30-0307E (editorial revision)

SEMI E30-0307 (technical revision)

SEMI E30-1103E2 (editorial revision)

SEMI E30-1103E (editorial revision)

SEMI E30-1103 (technical revision)

SEMI E30-0703 (technical revision)

SEMI E30-0303 (technical revision)

SEMI E30-1000 (technical revision)

SEMI E30-0600 (technical revision)

SEMI E30-0200A (technical revision)

SEMI E30-0200 (technical revision)

SEMI E30-0299 (technical revision)

SEMI E30-0998 (technical revision)

SEMI E30-0298 (technical revision)

SEMI E30-0997 (technical revision)

SEMI E30-1296 (technical revision)

SEMI E30-0996 (technical revision)

SEMI E30-95 (technical revision)

SEMI E30-94 (technical revision)

SEMI E30-93 (first published)

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