This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 30, 2010. Initially available at www.semi.org in June 2010. Originally published July 2004; previously published March 2010.

This specification describes a method for data acquisition consumers to request process and operational data from equipment to be communicated in an automated fashion by the equipment, or in an ad-hoc request from the consumer. It includes a mechanism for organizing related data into groups to make it more straightforward for enabling or disabling a large number of data sources, and to allow consumers to organize related data into groups according to their purpose. 

Subordinate Document:

SEMI E134.1-0710 - Specification for SOAP Binding of Data Collection Management (DCM)

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E40 — Standard for Processing Management
SEMI E94 — Specification for Control Job Management
SEMI E120.1 — XML Schema for the Common Equipment Model
SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications
SEMI E125 — Specification for Equipment Self Description (EqSD)
SEMI E125.1 — Specification for SOAP Implementation of Equipment Self Description
SEMI E128 – Specification for XML Messaging
SEMI E132.1 — Specification for SOAP Implementation of Equipment Client Authentication and Authorization
SEMI E138 — XML Semiconductor Common Components

SEMI E134-0710 (technical revision)

SEMI E134-0310 (designation update)

SEMI E134-0709E (editorial revision)

SEMI E134-0709 (technical revision)

SEMI E134-0308 (designation update)

SEMI E134-0307 (designation update)

SEMI E134-1105 (technical revision)

SEMI E134-0305 (designation update)

SEMI E134-1104E (editorial revision)

SEMI 134-0704 (first published)

SEMI E134.1-0710 (technical revision)

SEMI E134.1-0310 (technical revision)

SEMI E134.1-0709 (technical revision)

SEMI E134.1-0308 (technical revision)

SEMI E134.1-0307 (technical revision)

SEMI E134.1-1105 (technical revision)

SEMI E134.1-0305 (first published)