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SEMI S10-0307E - Safety Guideline for Risk Assessment and Risk Evaluation Process

Volume(s): Safety Guidelines
Language: English
Type: Single Standards Download (.pdf)
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This Safety Guideline was technically approved by the global Environmental Health & Safety Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 21, 2006. Available at www.semiviews.org and www.semi.org in March 2007; originally published December 1996; previously published November 2003.

E This standard was editorially modified in May 2010 to correct a note numbering error. Changes were made to Appendix 1.


The purpose of this guideline is to establish general principles for risk assessment to enable identification of hazards, risk estimation and risk evaluation in a consistent and practical manner. The document provides a framework for carrying out risk assessments on equipment in the semiconductor and similar industries and is intended for use by supplier and purchaser as a reference for EHS considerations.


Use of this safety guideline is intended to assist in the development of a strategy to prioritize and control risks.

Referenced SEMI Standards

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment

Revision History

SEMI S10-0307E (editorial revision)

SEMI S10-0307 (technical revision)

SEMI S10-1103 (complete rewrite)

SEMI S10-1296 (first published)

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