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SEMI Downloads
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Volumes(s): Equipment Automation Software
Language: English
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SEMI E125-0710 - Specification for Equipment Self Description (EqSD) |
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SEMI Standards Copyright Policy/License Agreements |
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Status |
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CURRENT - Supported by the technical committee. |
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Abstract |
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This standard was technically approved by the global Information &
Control Committee. This edition was approved for publication by the global
Audits & Reviews Subcommittee on April 30, 2010. Initially available at
www.semi.org in June 2010. Originally published July 2003; previously published
March 2010.
This specification describes a method for allowing equipment suppliers to
provide a description of the variables, events, exceptions, and physical
equipment configuration available from their equipment. With this information
available for consumption by software systems, it can be used as a tool to aid
the process of integrating equipment into a factory’s automation system.
Subordinate Document:
SEMI E125.1-0710 - Specification for SOAP Binding for Equipment Self
Description (EQSD) |
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Referenced SEMI Standards |
SEMI E30 — Generic Model for Communications and Control of Manufacturing
Equipment (GEM)
SEMI E39 — Object Services Standard: Concept, Behavior, and
Services
SEMI E120 — Specification for the Common Equipment Model
(CEM)
SEMI E120.1 — XML Schema for the Common Equipment Model
SEMI E121 —
Guide for Style & Usage of XML for Semiconductor Manufacturing
Applications
SEMI E128 — Specification for XML Messaging
SEMI E132.1 —
Specification for SOAP Binding of Equipment Client Authentication and
Authorization
SEMI E138 — XML Semiconductor Common Components
SEMI E145 —
Classification for Measurement Unit Symbols in XML
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Revision History: |
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SEMI E125-0710 (technical revision)
SEMI E125-0310 (technical
revision)
SEMI E125-0709 (technical revision)
SEMI E125-0308 (designation
update)
SEMI E125-0307 (technical revision)
SEMI E125-0306 (technical
revision)
SEMI E125-1105 (technical revision)
SEMI E125-0305 (designation
update)
SEMI E125-1104 (technical revision)
SEMI E125-0704 (technical
revision)
SEMI E125-0304 (technical revision)
SEMI E125-0703 (first
published)
SEMI E125.1-0710 (technical revision)
SEMI E125.1-0310 (technical
revision)
SEMI E125.1-0709 (technical revision)
SEMI E125.1-0308
(technical revision)
SEMI E125.1-1107 (technical revision)
SEMI
E125.1-0307 (technical revision)
SEMI E125.1-1105 (technical
revision)
SEMI E125.1-0305 (first published) |
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