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SEMI E125-0710 - Specification for Equipment Self Description (EqSD)

Volume(s): Equipment Automation Software
Language: English
Type: Single Standards Download (.pdf)
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This standard was technically approved by the global Information & Control Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 30, 2010. Initially available at www.semi.org in June 2010. Originally published July 2003; previously published March 2010.


This specification describes a method for allowing equipment suppliers to provide a description of the variables, events, exceptions, and physical equipment configuration available from their equipment. With this information available for consumption by software systems, it can be used as a tool to aid the process of integrating equipment into a factory’s automation system.


Subordinate Document:

SEMI E125.1-0710 - Specification for SOAP Binding for Equipment Self Description (EQSD)

Referenced SEMI Standards
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E39 — Object Services Standard: Concept, Behavior, and Services
SEMI E120 — Specification for the Common Equipment Model (CEM)
SEMI E120.1 — XML Schema for the Common Equipment Model
SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications
SEMI E128 — Specification for XML Messaging
SEMI E132.1 — Specification for SOAP Binding of Equipment Client Authentication and Authorization
SEMI E138 — XML Semiconductor Common Components
SEMI E145 — Classification for Measurement Unit Symbols in XML


Revision History

SEMI E125-0710 (technical revision)
SEMI E125-0310 (technical revision)
SEMI E125-0709 (technical revision)
SEMI E125-0308 (designation update)
SEMI E125-0307 (technical revision)
SEMI E125-0306 (technical revision)
SEMI E125-1105 (technical revision)
SEMI E125-0305 (designation update)
SEMI E125-1104 (technical revision)
SEMI E125-0704 (technical revision)
SEMI E125-0304 (technical revision)
SEMI E125-0703 (first published)


SEMI E125.1-0710 (technical revision)
SEMI E125.1-0310 (technical revision)
SEMI E125.1-0709 (technical revision)
SEMI E125.1-0308 (technical revision)
SEMI E125.1-1107 (technical revision)
SEMI E125.1-0307 (technical revision)
SEMI E125.1-1105 (technical revision)
SEMI E125.1-0305 (first published)

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